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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 20 — Oct. 7, 2013
  • pp: 23934–23941

Dynamic focus-tracking MEMS scanning micromirror with low actuation voltages for endoscopic imaging

Matthew Strathman, Yunbo Liu, Xingde Li, and Lih Y. Lin  »View Author Affiliations

Optics Express, Vol. 21, Issue 20, pp. 23934-23941 (2013)

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We demonstrate a 3-D scanning micromirror device that combines 2-D beam scanning with focus control in the same device using micro-electro-mechanical-systems (MEMS) technology. 2-D beam scanning is achieved with a biaxial gimbal structure and focus control is obtained with a deformable mirror membrane surface. The micromirror with 800 micrometer diameter is designed to be sufficiently compact and efficient so that it can be incorporated into an endoscopic imaging probe in the future. The design, fabrication and characterization of the device are described in this paper. Using the focus-tracking MEMS scanning mirror, we achieved an optical scanning range of >16 degrees with <40 V actuation voltage at resonance and a tunable focal length between infinity and 25 mm with <100V applied bias.

© 2013 Optical Society of America

OCIS Codes
(170.2150) Medical optics and biotechnology : Endoscopic imaging
(230.0230) Optical devices : Optical devices
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:
Medical Optics and Biotechnology

Original Manuscript: August 15, 2013
Revised Manuscript: September 23, 2013
Manuscript Accepted: September 23, 2013
Published: September 30, 2013

Matthew Strathman, Yunbo Liu, Xingde Li, and Lih Y. Lin, "Dynamic focus-tracking MEMS scanning micromirror with low actuation voltages for endoscopic imaging," Opt. Express 21, 23934-23941 (2013)

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