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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 20 — Oct. 7, 2013
  • pp: 24154–24162

A merged photonic crystal slot waveguide embedded in ALD-TiO2

Petri Stenberg, Matthieu Roussey, Piotr Ryczkowski, Goëry Genty, Seppo Honkanen, and Markku Kuittinen  »View Author Affiliations

Optics Express, Vol. 21, Issue 20, pp. 24154-24162 (2013)

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We demonstrate the concept of a merged nanoscale photonic crystal slot waveguide that acts as a bandpass filter in the near infrared region of the spectrum. The device is based on the integration of a photonic crystal cavity in a slot waveguide on a silicon on insulator substrate. The device is further embedded in amorphous titanium dioxide using atomic layer deposition, which allows to reduce two-photon absorption losses and creates the possibility to combine nonlinear guided-wave optics resulting from the strong field confinement in the slot region with slow light effects in the photonic crystal cavity. Our approach is fully compatible with complementary metal oxide semiconductor technology and opens up new perspectives for the integration of all-optical signal processing functionalities in hybrid silicon nanophotonics platforms.

© 2013 OSA

OCIS Codes
(190.4360) Nonlinear optics : Nonlinear optics, devices
(220.4241) Optical design and fabrication : Nanostructure fabrication
(230.5298) Optical devices : Photonic crystals
(310.6845) Thin films : Thin film devices and applications
(230.7408) Optical devices : Wavelength filtering devices

ToC Category:
Photonic Crystals

Original Manuscript: June 26, 2013
Revised Manuscript: September 11, 2013
Manuscript Accepted: September 16, 2013
Published: October 2, 2013

Petri Stenberg, Matthieu Roussey, Piotr Ryczkowski, Goëry Genty, Seppo Honkanen, and Markku Kuittinen, "A merged photonic crystal slot waveguide embedded in ALD-TiO2," Opt. Express 21, 24154-24162 (2013)

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