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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 20 — Oct. 7, 2013
  • pp: 24154–24162

A merged photonic crystal slot waveguide embedded in ALD-TiO2

Petri Stenberg, Matthieu Roussey, Piotr Ryczkowski, Goëry Genty, Seppo Honkanen, and Markku Kuittinen  »View Author Affiliations


Optics Express, Vol. 21, Issue 20, pp. 24154-24162 (2013)
http://dx.doi.org/10.1364/OE.21.024154


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Abstract

We demonstrate the concept of a merged nanoscale photonic crystal slot waveguide that acts as a bandpass filter in the near infrared region of the spectrum. The device is based on the integration of a photonic crystal cavity in a slot waveguide on a silicon on insulator substrate. The device is further embedded in amorphous titanium dioxide using atomic layer deposition, which allows to reduce two-photon absorption losses and creates the possibility to combine nonlinear guided-wave optics resulting from the strong field confinement in the slot region with slow light effects in the photonic crystal cavity. Our approach is fully compatible with complementary metal oxide semiconductor technology and opens up new perspectives for the integration of all-optical signal processing functionalities in hybrid silicon nanophotonics platforms.

© 2013 OSA

OCIS Codes
(190.4360) Nonlinear optics : Nonlinear optics, devices
(220.4241) Optical design and fabrication : Nanostructure fabrication
(230.5298) Optical devices : Photonic crystals
(310.6845) Thin films : Thin film devices and applications
(230.7408) Optical devices : Wavelength filtering devices

ToC Category:
Photonic Crystals

History
Original Manuscript: June 26, 2013
Revised Manuscript: September 11, 2013
Manuscript Accepted: September 16, 2013
Published: October 2, 2013

Citation
Petri Stenberg, Matthieu Roussey, Piotr Ryczkowski, Goëry Genty, Seppo Honkanen, and Markku Kuittinen, "A merged photonic crystal slot waveguide embedded in ALD-TiO2," Opt. Express 21, 24154-24162 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-20-24154


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References

  1. M. Mongillo, P. Spathis, G. Katsaros, P. Gentile, and S. De Franceschi, “Multifunctional devices and logic gates with undoped silicon nanowires,” Nano Lett.12, 3074–3079 (2012). [CrossRef] [PubMed]
  2. T. Stöferle, N. Moll, T. Wahlbrink, J. Bolten, T. Mollenhauer, U. Scherf, and R. F. Mahrt, “Ultracompact silicon/polymer laser with an absorption-insensitive nanophotonic resonator,” Nano Lett.10, 3675–3678 (2010). [CrossRef] [PubMed]
  3. J. Leuthold, C. Koos, and W. Freude, “Nonlinear silicon photonics,” Nat. Photonics4, 535–544 (2010). [CrossRef]
  4. K. Narayanan and S. F. Preble, “Optical nonlinearities in hydrogenated-amorphous silicon waveguides,” Opt. Express18, 8998–9005 (2010). [CrossRef] [PubMed]
  5. A. Martinez, J. Blasco, P. Sanchis, J. V. Galan, J. Garcia-Ruperez, E. Jordana, P. Gautier, Y. Lebour, S. Hernandez, R. Spano, R. Guider, N. Daldosso, B. Garrido, J. M. Fedeli, L. Pavesi, and J. Marti, “Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths,” Nano Lett.10, 1506–1511 (2010). [CrossRef] [PubMed]
  6. C. Koos, P. Vorreau, P. Dumon, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “Highly-nonlinear silicon photonics slot waveguide,” Proceedings of Optical Fiber Communications ConferencePDP25 (2008).
  7. J. Matres, C. Lacava, G. C. Ballesteros, P. Minzioni, I. Cristiani, J. M. Fédéli, J. Marti, and C. J. Oton, “Low TPA and free-carrier effects in silicon nanocrystal-based horizontal slot waveguides,” Opt. Express20, 23838–23845 (2012). [CrossRef] [PubMed]
  8. M. Ritala and J. Niinistö, “Atomic layer deposition” in Chemical Vapour Deposition: Precursors, Processes and Applications, (The Royal Society of Chemistry, 2009), pp. 158–206.
  9. V. Miikkulainen, M. Leskelä, M. Ritala, and R. L. Puurunen, “Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends,” J. App. Phys.113, 021301 (2013). [CrossRef]
  10. A. Säynätjoki, T. Alasaarela, A. Khanna, L. Karvonen, P. Stenberg, M. Kuittinen, A. Tervonen, and S. Honkanen, “Angled sidewalls in silicon slot waveguides: conformal filling and mode properties,” Opt. Express17, 21066–21075 (2009). [CrossRef] [PubMed]
  11. F. Riboli, P. Bettotti, and L. Pavesi, “Band gap characterization and slow light effects in one dimensional photonic crystals based on silicon slot-waveguides,” Opt. Express15, 11769–11775 (2007). [CrossRef] [PubMed]
  12. M. Soljačić and J. D. Joannopoulos, “Enhancement of nonlinear effects using photonic crystals,” Nature (London)3, 211–218 (2004). [CrossRef]
  13. Y. A. Vlasov, M. O’Boyle, H. F. Hamann, and S. J. McNab, “Active control of slow light on a chip with photonic crystal waveguides,” Nature (London)438, 64–69 (2006).
  14. M. Roussey, F. I. Baida, and M.-P. Bernal, “Experimental and theoretical observations of the slow-light effect on a tunable photonic crystal,” J. Opt. Soc. Am. B24, 1416–1422 (2007). [CrossRef]
  15. K. T. Zhu, T. S. Deng, Y. Sun, Q. F. Zhang, and J. L. Wu, “Slow light property in ring-shape-hole slotted photonic crystal waveguide,” Opt. Commun.290, 87–91 (2013). [CrossRef]
  16. A. Di Falco, M. Massari, M. G. Scullion, S. A. Schulz, F. Romanato, and T. F. Krauss, “Propagation losses of slotted photonic crystal waveguides,” IEEE Photon. J.4, 1536–1541 (2012). [CrossRef]
  17. Y. Zhao, Y. N. Zhang, D. Wu, and Q. Wang, “Wideband slow light with large group index and low dispersion in slotted photonic crystal waveguide,” J. Lightwave Technol30, 2812–2817 (2012). [CrossRef]
  18. T. Alasaarela, D. Korn, L. Alloatti, A. Säynätjoki, A. Tervonen, R. Palmer, J. Leuthold, W. Freude, and S. Honkanen, “Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition,” Opt. Express19, 11529–11538 (2011). [CrossRef] [PubMed]
  19. A. Säynätjoki, L. Karvonen, T. Alasaarela, X. Tu, T. Liow, M. Hiltunen, A. Tervonen, G. Lo, and S. Honkanen, “Low-loss silicon slot waveguides and couplers fabricated with optical lithography and atomic layer deposition,” Opt. Express19, 26275–26282 (2011). [CrossRef]
  20. A. Taflove and S. C. Hagness, Computational Electrodynamics, the Finite-Difference Time-Domain (Artech House, 2000).
  21. T. Baba and D. Mori, “Slow light engineering in photonic crystals,” J. Phys. D Appl. Phys.40, 2659–2665 (2007). [CrossRef]
  22. T. Alasaarela, T. Saastamoinen, J. Hiltunen, A. Säynätjoki, A. Tervonen, P. Stenberg, M. Kuittinen, and S. Honkanen, “Atomic layer deposited titanium dioxide and its application in resonant waveguide grating,” Appl. Opt.49, 4321–4325 (2010). [CrossRef] [PubMed]
  23. R. Adair, L. Chase, and S. Payne, “Nonlinear refractive index of optical crystals,” Phys. Rev. B39, 3337–3350 (1989). [CrossRef]
  24. T. Alasaarela, L. Karvonen, H. Jussila, A. Säynätjoki, S. Mehravar, R.A. Norwood, N. Peyghambarian, K. Kieu, I. Tittonen, and H. Lipsanen, “High quality crystallinity controlled ALD TiO2for waveguiding applications,” Opt. Lett. (In press 2013).
  25. J. D. B. Bradley, C. C. Evans, J. T. Choy, O. Reshef, P. B. Deotare, F. Parsy, K. C. Phillips, M. Lončar, and E. Mazur, “Submicrometer-wide amorphous and polycrystalline anatase TiO2waveguides for microphotonic devices,” Opt. Express20, 23821–23831 (2012). [CrossRef] [PubMed]

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