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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 21 — Oct. 21, 2013
  • pp: 24799–24808

Correction of rotational inaccuracy in lateral shearing interferometry for freeform measurement

Hyug-Gyo Rhee, Young-Sik Ghim, Joohyung Lee, Ho-Soon Yang, and Yun-Woo Lee  »View Author Affiliations

Optics Express, Vol. 21, Issue 21, pp. 24799-24808 (2013)

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A lateral shearing interferometer has an advantage over previous wavefront measuring interferometers since it requires no reference. Therefore the lateral shearing interferometer can be a powerful solution to measure a freeform surface. It, however, has some issues to be resolved before it can be implemented. One of them is the orthogonality problem between two shearing directions in LSI. Previous wavefront reconstruction algorithms assume that the shearing directions are perfectly orthogonal to each other and lateral shear is obtained simultaneously in the sagittal and tangential directions. For practical LSI, however, there is no way to guarantee perfect orthogonality between two shearing directions. Motivated by this, we propose a new algorithm that is able to compensate the rotational inaccuracy. The mathematical model is derived in this paper. Computer simulations and experiments are also displayed to verify our algorithm.

© 2013 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: August 14, 2013
Revised Manuscript: September 30, 2013
Manuscript Accepted: October 2, 2013
Published: October 9, 2013

Hyug-Gyo Rhee, Young-Sik Ghim, Joohyung Lee, Ho-Soon Yang, and Yun-Woo Lee, "Correction of rotational inaccuracy in lateral shearing interferometry for freeform measurement," Opt. Express 21, 24799-24808 (2013)

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