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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 22 — Nov. 4, 2013
  • pp: 25805–25819

Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide

Feng Qibo, Zhang Bin, Cui Cunxing, Kuang Cuifang, Zhai Yusheng, and You Fenglin  »View Author Affiliations


Optics Express, Vol. 21, Issue 22, pp. 25805-25819 (2013)
http://dx.doi.org/10.1364/OE.21.025805


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Abstract

A simple method for simultaneously measuring the 6DOF geometric motion errors of the linear guide was proposed. The mechanisms for measuring straightness and angular errors and for enhancing their resolution are described in detail. A common-path method for measuring the laser beam drift was proposed and it was used to compensate the errors produced by the laser beam drift in the 6DOF geometric error measurements. A compact 6DOF system was built. Calibration experiments with certain standard measurement meters showed that our system has a standard deviation of 0.5 µm in a range of ± 100 µm for the straightness measurements, and standard deviations of 0.5 " , 0.5 " , and 1.0 " in the range of ± 100 " for pitch, yaw, and roll measurements, respectively.

© 2013 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: August 5, 2013
Revised Manuscript: October 11, 2013
Manuscript Accepted: October 13, 2013
Published: October 22, 2013

Citation
Feng Qibo, Zhang Bin, Cui Cunxing, Kuang Cuifang, Zhai Yusheng, and You Fenglin, "Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide," Opt. Express 21, 25805-25819 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-22-25805


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