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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 22 — Nov. 4, 2013
  • pp: 26219–26226

Three-dimensional deep sub-wavelength defect detection using λ = 193 nm optical microscopy

Bryan M. Barnes, Martin Y. Sohn, Francois Goasmat, Hui Zhou, András E. Vladár, Richard M. Silver, and Abraham Arceo  »View Author Affiliations

Optics Express, Vol. 21, Issue 22, pp. 26219-26226 (2013)

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Optical microscopy is sensitive both to arrays of nanoscale features and to their imperfections. Optimizing scattered electromagnetic field intensities from deep sub-wavelength nanometer scale structures represents an important element of optical metrology. Current, well-established optical methods used to identify defects in semiconductor patterning are in jeopardy by upcoming sub-20 nm device dimensions. A novel volumetric analysis for processing focus-resolved images of defects is presented using simulated and experimental examples. This new method allows defects as narrow as (16 ± 2) nm (k = 1) to be revealed using 193 nm light with focus and illumination conditions optimized for three-dimensional data analysis. Quantitative metrics to compare two-dimensional and three-dimensional imaging indicate possible fourfold improvements in sensitivity using these methods.

© 2013 Optical Society of America

OCIS Codes
(100.6890) Image processing : Three-dimensional image processing
(150.3040) Machine vision : Industrial inspection
(150.1835) Machine vision : Defect understanding
(050.6624) Diffraction and gratings : Subwavelength structures

ToC Category:
Image Processing

Original Manuscript: July 31, 2013
Revised Manuscript: October 18, 2013
Manuscript Accepted: October 19, 2013
Published: October 25, 2013

Virtual Issues
Vol. 9, Iss. 1 Virtual Journal for Biomedical Optics

Bryan M. Barnes, Martin Y. Sohn, Francois Goasmat, Hui Zhou, András E. Vladár, Richard M. Silver, and Abraham Arceo, "Three-dimensional deep sub-wavelength defect detection using λ = 193 nm optical microscopy," Opt. Express 21, 26219-26226 (2013)

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