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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 22 — Nov. 4, 2013
  • pp: 26797–26805

Laser-manufactured mirrors for geometrical output coupling of intracavity-generated high harmonics

Dominik Esser, Johannes Weitenberg, Wiebke Bröring, Ioachim Pupeza, Simon Holzberger, and Hans-Dieter Hoffmann  »View Author Affiliations

Optics Express, Vol. 21, Issue 22, pp. 26797-26805 (2013)

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We demonstrate micro structuring of fused-silica laser mirror substrates by Inverse Laser Drilling. Slits of a width down to ~80 µm and circular holes with diameters down to ~50 µm have been structured into quarter-inch thick substrates. Except for chipping, the surface areas around these openings have not been irreversibly affected by the manufacturing process. The micro structured mirrors can be used for geometrical output coupling of coherent EUV radiation from cavity-enhanced high harmonic generation.

© 2013 Optical Society of America

OCIS Codes
(140.7240) Lasers and laser optics : UV, EUV, and X-ray lasers
(190.4360) Nonlinear optics : Nonlinear optics, devices
(220.4610) Optical design and fabrication : Optical fabrication
(070.5753) Fourier optics and signal processing : Resonators

ToC Category:
Laser Microfabrication

Original Manuscript: September 20, 2013
Revised Manuscript: October 18, 2013
Manuscript Accepted: October 19, 2013
Published: October 30, 2013

Dominik Esser, Johannes Weitenberg, Wiebke Bröring, Ioachim Pupeza, Simon Holzberger, and Hans-Dieter Hoffmann, "Laser-manufactured mirrors for geometrical output coupling of intracavity-generated high harmonics," Opt. Express 21, 26797-26805 (2013)

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  1. C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature436(7048), 234–237 (2005). [CrossRef] [PubMed]
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