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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 23 — Nov. 18, 2013
  • pp: 27550–27557

Investigation of cascaded SiN microring resonators at 1.3 µm and 1.5 µm

Vanessa Zamora, Peter Lützow, Martin Weiland, and Daniel Pergande  »View Author Affiliations

Optics Express, Vol. 21, Issue 23, pp. 27550-27557 (2013)

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An optical device operating at wavelengths around 1.3 µm and 1.5 µm is demonstrated experimentally. It is based on cascaded microring resonators (CMRRs) and the Vernier effect (VE). The architecture consists of two microring resonators (MRRs) connected via a common waveguide; two waveguides were added for the interrogation of CMRRs. The free spectral ranges of both MRRs are slightly different in order to activate the VE, which is known to enhance the sensitivity in optical sensors. CMRRs were fabricated on a silicon nitride (SiN) platform. Two types of buffer layers—benzocyclobutene (BCB) polymer and thermal silicon oxide (SiOx)—were tested. A study of CMRRs was carried out with three structures of different structural parameters. The experimental results show good agreement with the theoretical analysis. This approach is promising for the fabrication of highly sensitive optical sensors in wide operating wavelength range.

© 2013 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(130.6010) Integrated optics : Sensors
(230.5750) Optical devices : Resonators

ToC Category:
Integrated Optics

Original Manuscript: June 21, 2013
Revised Manuscript: August 16, 2013
Manuscript Accepted: August 21, 2013
Published: November 4, 2013

Vanessa Zamora, Peter Lützow, Martin Weiland, and Daniel Pergande, "Investigation of cascaded SiN microring resonators at 1.3 µm and 1.5 µm," Opt. Express 21, 27550-27557 (2013)

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