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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 23 — Nov. 18, 2013
  • pp: 28272–28289

Removal of scratches on fused silica optics by using a CO2 laser

P. Cormont, P. Combis, L. Gallais, C. Hecquet, L. Lamaignère, and J. L. Rullier  »View Author Affiliations

Optics Express, Vol. 21, Issue 23, pp. 28272-28289 (2013)

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We investigate the efficiency of local CO2 laser processing of scratches on silica optics in order to enhance the nanosecond UV-laser damage resistance. The surface deformations induced by the process have been measured for different CO2 laser parameters and then the pulse duration and the beam diameter have been chosen accordingly to limit those deformations below 1 µm. From the study of the laser damage resistance as a function of different material modifications we identify a range of optimal radiation parameters allowing a complete elimination of scratches associated with a high threshold of laser damage. Calculation of the temperature of silica using a two-dimensional axi-symmetric code was compared with experiment, supporting an optimization of the laser parameter as a function of the maximal dimensions of scratches that could be removed by this process.

© 2013 Optical Society of America

OCIS Codes
(140.3330) Lasers and laser optics : Laser damage
(160.6030) Materials : Silica
(220.4610) Optical design and fabrication : Optical fabrication

ToC Category:
Laser Microfabrication

Original Manuscript: August 6, 2013
Revised Manuscript: October 4, 2013
Manuscript Accepted: October 10, 2013
Published: November 11, 2013

P. Cormont, P. Combis, L. Gallais, C. Hecquet, L. Lamaignère, and J. L. Rullier, "Removal of scratches on fused silica optics by using a CO2 laser," Opt. Express 21, 28272-28289 (2013)

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