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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 23 — Nov. 18, 2013
  • pp: 28325–28333

An 11-frame phase shifting algorithm in lateral shearing interferometry

Chao Fang, Yang Xiang, Keqi Qi, Chunlei Zhang, and Changsong Yu  »View Author Affiliations

Optics Express, Vol. 21, Issue 23, pp. 28325-28333 (2013)

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In order to eliminate zeroth order effect and to make the phase shifting algorithm insensitive to phase shifting error, an 11-frame phase shifting algorithm is proposed in this paper. The analytical expression of phase-restoration error function is derived. The principle of phase shifting error compensation and the capability of suppressing zeroth order effect are explained, in comparison of existing algorithm. The analytical results show that this algorithm’s phase-restoration error is proportional to sine of double shearing phase and to biquadratic of phase shifting error. Finally, we generate the interference patterns of 11-frame algorithm and existing algorithm, restore the shearing phases and calculate the phase-restoration errors by simulations. The simulation results verify the theoretical analyses.

© 2013 Optical Society of America

OCIS Codes
(050.5080) Diffraction and gratings : Phase shift
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: August 29, 2013
Revised Manuscript: October 17, 2013
Manuscript Accepted: October 31, 2013
Published: November 11, 2013

Chao Fang, Yang Xiang, Keqi Qi, Chunlei Zhang, and Changsong Yu, "An 11-frame phase shifting algorithm in lateral shearing interferometry," Opt. Express 21, 28325-28333 (2013)

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