OSA's Digital Library

Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 23 — Nov. 18, 2013
  • pp: 28380–28386

Hour-long continuous operation of a tabletop soft x-ray laser at 50-100 Hz repetition rate

Brendan A. Reagan, Wei Li, Lukasz Urbanski, Keith A. Wernsing, Chase Salsbury, Cory Baumgarten, Mario C. Marconi, Carmen. S. Menoni, and Jorge J. Rocca  »View Author Affiliations


Optics Express, Vol. 21, Issue 23, pp. 28380-28386 (2013)
http://dx.doi.org/10.1364/OE.21.028380


View Full Text Article

Enhanced HTML    Acrobat PDF (1389 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We report the uninterrupted operation of an 18.9 nm wavelength tabletop soft x-ray laser at 100 Hz repetition rate for extended periods of time. An average power of about 0.1 mW was obtained by irradiating a Mo target with pulses from a compact diode-pumped chirped pulse amplification Yb:YAG laser. Series of up to 1.8 x 105 consecutive laser pulses of ~1 µJ energy were generated by displacing the surface of a high shot-capacity rotating molybdenum target by ~2 µm between laser shots. As a proof-of-principle demonstration of the use of this compact ultrashort wavelength laser in applications requiring a high average power coherent beam, we lithographically printed an array of nanometer-scale features using coherent Talbot self-imaging.

© 2013 Optical Society of America

OCIS Codes
(140.3480) Lasers and laser optics : Lasers, diode-pumped
(140.7240) Lasers and laser optics : UV, EUV, and X-ray lasers
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
Lasers and Laser Optics

History
Original Manuscript: September 25, 2013
Revised Manuscript: November 4, 2013
Manuscript Accepted: November 4, 2013
Published: November 11, 2013

Citation
Brendan A. Reagan, Wei Li, Lukasz Urbanski, Keith A. Wernsing, Chase Salsbury, Cory Baumgarten, Mario C. Marconi, Carmen. S. Menoni, and Jorge J. Rocca, "Hour-long continuous operation of a tabletop soft x-ray laser at 50-100 Hz repetition rate," Opt. Express 21, 28380-28386 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-23-28380


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. J. Filevich, K. Kanizay, M. C. Marconi, J. L. A. Chilla, and J. J. Rocca, “Dense plasma diagnostics with an amplitude-division soft-x-ray laser interferometer based on diffraction gratings,” Opt. Lett.25(5), 356–358 (2000). [CrossRef] [PubMed]
  2. T. Suemoto, K. Terakawa, Y. Ochi, T. Tomita, M. Yamamoto, N. Hasegawa, M. Deki, Y. Minami, and T. Kawachi, “Single-shot picosecond interferometry with one-nanometer resolution for dynamical surface morphology using a soft X-ray laser,” Opt. Express18(13), 14114–14122 (2010). [CrossRef] [PubMed]
  3. G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, and D. T. Attwood, “Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,” Opt. Lett.31(9), 1214–1216 (2006). [CrossRef] [PubMed]
  4. S. Carbajo, I. D. Howlett, F. Brizuela, K. S. Buchanan, M. C. Marconi, W. Chao, E. H. Anderson, I. Artioukov, A. Vinogradov, J. J. Rocca, and C. S. Menoni, “Sequential single-shot imaging of nanoscale dynamic interactions with a table-top soft x-ray laser,” Opt. Lett.37(14), 2994–2996 (2012). [CrossRef] [PubMed]
  5. F. Brizuela, Y. Wang, C. A. Brewer, F. Pedaci, W. Chao, E. H. Anderson, Y. Liu, K. A. Goldberg, P. Naulleau, P. Wachulak, M. C. Marconi, D. T. Attwood, J. J. Rocca, and C. S. Menoni, “Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination,” Opt. Lett.34(3), 271–273 (2009). [CrossRef] [PubMed]
  6. I. Kuznetsov, J. Filevich, F. Dong, W. L. Chao, E. H. Anderson, E. R. Bernstein, D. C. Crick, J. J. Rocca, and C. S. Menoni, “Nanoscale 3D composition imaging by soft x-ray laser ablation mass spectrometry,” 2012 Conference on Lasers and Electro-Optics (CLEO) (2012). [CrossRef]
  7. B. Zielbauer, J. Habib, S. Kazamias, O. Guilbaud, M. Pittman, D. Ros, M.-A. H. du Penhoat, A. Touati, C. Le Sech, and E. Porcel, “Strand breaks in DNA samples induced with LASERIX,” in X-Ray Lasers 2008 (Springer, 2009), pp. 409–411.
  8. H. Bravo, B. T. Szapiro, P. W. Wachulak, M. C. Marconi, W. Chao, E. H. Anderson, C. S. Menoni, and J. J. Rocca, “Demonstration of nanomachining with focused extreme ultraviolet laser beams,” IEEE J. Sel. Top. Quantum Electron.18(1), 443–448 (2012). [CrossRef]
  9. L. Urbanski, A. Isoyan, A. Stein, J. J. Rocca, C. S. Menoni, and M. C. Marconi, “Defect-tolerant extreme ultraviolet nanoscale printing,” Opt. Lett.37(17), 3633–3635 (2012). [CrossRef] [PubMed]
  10. B. R. Benware, C. D. Macchietto, C. H. Moreno, and J. J. Rocca, “Demonstration of a high average power tabletop soft X-ray laser,” Phys. Rev. Lett.81(26), 5804–5807 (1998). [CrossRef]
  11. C. D. Macchietto, B. R. Benware, and J. J. Rocca, “Generation of millijoule-level soft-x-ray laser pulses at a 4-Hz repetition rate in a highly saturated tabletop capillary discharge amplifier,” Opt. Lett.24(16), 1115–1117 (1999). [CrossRef] [PubMed]
  12. Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, “Demonstration of high-repetition-rate tabletop soft-x-ray lasers with saturated output at wavelengths down to 13.9 nm and gain down to 10.9 nm,” Phys. Rev. A72(5), 053807 (2005). [CrossRef]
  13. D. H. Martz, D. Alessi, B. M. Luther, Y. Wang, D. Kemp, M. Berrill, and J. J. Rocca, “High-energy 13.9 nm table-top soft-x-ray laser at 2.5 Hz repetition rate excited by a slab-pumped Ti: sapphire laser,” Opt. Lett.35(10), 1632–1634 (2010). [CrossRef] [PubMed]
  14. M. Grünig, C. Imesch, F. Staub, and J. E. Balmer, “Saturated X-ray lasing in Ni-like Sn at 11.9 nm using the GRIP scheme,” Opt. Commun.282(2), 267–271 (2009). [CrossRef]
  15. H. T. Kim, I. W. Choi, N. Hafz, J. H. Sung, T. J. Yu, K.-H. Hong, T. M. Jeong, Y.-C. Noh, D.-K. Ko, K. A. Janulewicz, J. Tümmler, P. Nickles, W. Sandner, and J. Lee, “Demonstration of a saturated Ni-like Ag x-ray laser pumped by a single profiled laser pulse from a 10-Hz Ti: sapphire laser system,” Phys. Rev. A77(2), 023807 (2008). [CrossRef]
  16. D. Zimmer, B. Zielbauer, M. Pittman, O. Guilbaud, J. Habib, S. Kazamias, D. Ros, V. Bagnoud, and T. Kuehl, “Optimization of a tabletop high-repetition-rate soft x-ray laser pumped in double-pulse single-beam grazing incidence,” Opt. Lett.35(4), 450–452 (2010). [CrossRef] [PubMed]
  17. D. Alessi, Y. Wang, B. M. Luther, L. Yin, D. H. Martz, M. R. Woolston, Y. Liu, M. Berrill, and J. J. Rocca, “Efficient excitation of gain-saturated sub-9-nm-wavelength tabletop soft-X-ray lasers and lasing down to 7.36 nm,” Phys. Rev. X1, 021023 (2011).
  18. B. A. Reagan, K. A. Wernsing, A. H. Curtis, F. J. Furch, B. M. Luther, D. Patel, C. S. Menoni, and J. J. Rocca, “Demonstration of a 100 Hz repetition rate gain-saturated diode-pumped table-top soft x-ray laser,” Opt. Lett.37(17), 3624–3626 (2012). [CrossRef] [PubMed]
  19. M. Nishikino, Y. Ochi, N. Hasegawa, T. Kawachi, H. Yamatani, T. Ohba, T. Kaihori, and K. Nagashima, “Demonstration of a highly coherent 13.9 nm x-ray laser from a silver tape target,” Rev. Sci. Instrum.80(11), 116102 (2009). [CrossRef] [PubMed]
  20. A. Weith, M. A. Larotonda, Y. Wang, B. M. Luther, D. Alessi, M. C. Marconi, J. J. Rocca, and J. Dunn, “Continuous high-repetition-rate operation of collisional soft-x-ray lasers with solid targets,” Opt. Lett.31(13), 1994–1996 (2006). [CrossRef] [PubMed]
  21. B. Zielbauer, D. Zimmer, J. Habib, O. Guilbaud, S. Kazamias, M. Pittman, and D. Ros, “Stable and fully controlled long-time operation of a soft X-ray laser for user application experiments,” Appl. Phys. B100(4), 731–736 (2010). [CrossRef]
  22. A. H. Curtis, B. A. Reagan, K. A. Wernsing, F. J. Furch, B. M. Luther, and J. J. Rocca, “Demonstration of a compact 100 Hz, 0.1 J, diode-pumped picosecond laser,” Opt. Lett.36(11), 2164–2166 (2011). [CrossRef] [PubMed]
  23. B. A. Reagan, A. H. Curtis, K. A. Wernsing, F. J. Furch, B. M. Luther, and J. J. Rocca, “Development of high energy diode-pumped thick-disk Yb: YAG chirped-pulse-amplification lasers,” IEEE J. Quantum Electron.48(6), 827–835 (2012). [CrossRef]
  24. R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V. N. Shlyaptsev, “High-repetition-rate grazing-incidence pumped x-ray laser operating at 18.9 nm,” Phys. Rev. Lett.94(10), 103901 (2005). [CrossRef] [PubMed]
  25. B. M. Luther, Y. Wang, M. A. Larotonda, D. Alessi, M. Berrill, M. C. Marconi, J. J. Rocca, and V. N. Shlyaptsev, “Saturated high-repetition-rate 18.9-nm tabletop laser in nickellike molybdenum,” Opt. Lett.30(2), 165–167 (2005). [CrossRef] [PubMed]
  26. Y. Wang, E. Granados, F. Pedaci, D. Alessi, B. Luther, M. Berrill, and J. J. Rocca, “Phase-coherent, injection-seeded, table-top soft-X-ray lasers at 18.9 nm and 13.9 nm,” Nat. Photonics2(2), 94–98 (2008). [CrossRef]
  27. M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A68(6), 061802 (2003). [CrossRef]
  28. A. Isoyan, F. Jiang, Y. Cheng, F. Cerrina, P. Wachulak, L. Urbanski, J. Rocca, C. Menoni, and M. Marconi, “Talbot lithography: Self-imaging of complex structures,” J. Vac. Sci. Technol. B27(6), 2931–2937 (2009). [CrossRef]
  29. C. Zanke, M. H. Qi, and H. I. Smith, “Large-area patterning for photonic crystals via coherent diffraction lithography,” J. Vac. Sci. Technol. B22(6), 3352–3355 (2004). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 
Fig. 4
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited