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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 23 — Nov. 18, 2013
  • pp: 28771–28782

Correlation-based smoothing model for optical polishing

Yong Shu, Dae Wook Kim, Hubert M. Martin, and James H. Burge  »View Author Affiliations


Optics Express, Vol. 21, Issue 23, pp. 28771-28782 (2013)
http://dx.doi.org/10.1364/OE.21.028771


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Abstract

A generalized model is developed to quantitatively describe the smoothing effects from different polishing tools used for optical surfaces. The smoothing effect naturally corrects mid-to-high spatial frequency errors that have features small compared to the size of the polishing lap. The original parametric smoothing model provided a convenient way to compare smoothing efficiency of different polishing tools for the case of sinusoidal surface irregularity, providing the ratio of surface improvement via smoothing to the bulk material removal. A new correlation-based smoothing model expands the capability to quantify smoothing using general surface data with complex irregularity. For this case, we define smoothing as a band-limited correlated component of the change in the surface and original surface. Various concepts and methods, such as correlation screening, have been developed and verified to manipulate the data for the calculation of smoothing factor. Data from two actual polishing runs from the Giant Magellan Telescope off-axis segment and the Large Synoptic Survey Telescope monolithic primary-tertiary mirror were processed, and a quantitative evaluation for the smoothing efficiency of a large pitch lap and a conformal lap with polishing pads is provided.

© 2013 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4610) Optical design and fabrication : Optical fabrication
(220.5450) Optical design and fabrication : Polishing

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: July 15, 2013
Revised Manuscript: November 5, 2013
Manuscript Accepted: November 6, 2013
Published: November 14, 2013

Citation
Yong Shu, Dae Wook Kim, Hubert M. Martin, and James H. Burge, "Correlation-based smoothing model for optical polishing," Opt. Express 21, 28771-28782 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-23-28771


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References

  1. R. A. Jones, “Computer control for grinding and polishing,” Photon. Spectra34–39 (1963).
  2. S. C. West, H. M. Martin, R. H. Nagel, R. S. Young, W. B. Davison, T. J. Trebisky, S. T. Derigne, and B. B. Hille, “Practical design and performance of the stressed-lap polishing tool,” Appl. Opt.33(34), 8094–8100 (1994). [CrossRef] [PubMed]
  3. D. Golini, W. I. Kordonski, P. Dumas, and S. Hogan, “Magnetorheological finishing (MRF) in commercial precision optics manufacturing,” Proc. SPIE3782, 80–91 (1999). [CrossRef]
  4. D. D. Walker, R. Freeman, R. Morton, G. McCavana, and A. Beaucamp, “Use of the ‘Precessions’TM process for prepolishing and correcting 2D & 2(1/2)D form,” Opt. Express14(24), 11787–11795 (2006). [CrossRef] [PubMed]
  5. D. W. Kim and J. H. Burge, “Rigid conformal polishing tool using non-linear visco-elastic effect,” Opt. Express18(3), 2242–2257 (2010). [CrossRef] [PubMed]
  6. R. Angel, “Very large ground-based telescopes for optical and IR astronomy 4,” Nature295(5851), 651–657 (1982). [CrossRef]
  7. R. Angel, “Future optical and infrared telescopes 3,” Nature409(6818), 427–430 (2001). [CrossRef] [PubMed]
  8. H. M. Martin, R. G. Allen, J. H. Burge, D. W. Kim, J. S. Kingsley, K. Law, R. D. Lutz, P. A. Strittmatter, P. Su, M. T. Tuell, S. C. West, and P. Zhou, “Production of 8.4 m segments for the Giant Magellan Telescope,” in Modern Technologies in Space-and-Ground-based Telescopes and Instrumentation II, Proc. SPIE8450, 84502D (2012).
  9. J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical material and fabrication technologies: An overview,” Proc. SPIE5341, 84–101 (2004). [CrossRef]
  10. D. W. Kim, W. H. Park, H. K. An, and J. H. Burge, “Parametric smoothing model for visco-elastic polishing tools,” Opt. Express18(21), 22515–22526 (2010). [CrossRef] [PubMed]
  11. J. S. Taylor, G. E. Sommargren, D. W. Sweeney, and R. M. Hudyma, “The fabrication and Testing of Optics for EUV Projection Lithography,” presented at the 23rd Annual International Symposium on Microlithography, Santa Clara, California, USA, 22–27 Feb. 1998. [CrossRef]
  12. D. W. Kim, S. W. Kim, and J. H. Burge, “Non-sequential optimization technique for a computer controlled optical surfacing process using multiple tool influence functions,” Opt. Express17(24), 21850–21866 (2009). [CrossRef] [PubMed]
  13. N. J. Brown, P. C. Baker, and R. E. Parks, “The polishing-to-figuring transition in turned optics,” SPIE’s 25th Annual International Technical Symposium,(SPIE, 1982). [CrossRef]
  14. R. A. Jones, “Computer simulation of smoothing during computer-controlled optical polishing,” Appl. Opt.34(7), 1162–1169 (1995). [CrossRef] [PubMed]
  15. P. K. Mehta and P. B. Reid, “A mathematical model for optical smoothing prediction of high-spatial frequency surface errors,” in Optomechanical Engineering and Vibration Control, E. A. Derby, C. G. Gordon, D. Vukobratovich, P. R. Yoder Jr., and C. H. Zweben, eds., Proc. SPIE 3786, 447 (1999).
  16. M. T. Tuell, J. H. Burge, and B. Anderson, “Aspheric optics: smoothing the ripples with semiflexible tools,” Opt. Eng.41(7), 1473–1474 (2002). [CrossRef]
  17. D. W. Kim, H. M. Martin, and J. H. Burge, “Control of Mid-spatial-frequency Errors for Large Steep Aspheric Surfaces,” in Optical Fabrication and Testing (OF&T) Technical Digest (Optical Society of America, Washington, DC), OM4D.1 (2012).
  18. P. Su, R. E. Parks, L. Wang, R. P. Angel, and J. H. Burge, “Software configurable optical test system: a computerized reverse Hartmann test,” Appl. Opt.49(23), 4404–4412 (2010). [CrossRef] [PubMed]

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