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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 24 — Dec. 2, 2013
  • pp: 29643–29655

Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon

Thibault J.-Y. Derrien, Jörg Krüger, Tatiana E. Itina, Sandra Höhm, Arkadi Rosenfeld, and Jörn Bonse  »View Author Affiliations

Optics Express, Vol. 21, Issue 24, pp. 29643-29655 (2013)

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The formation of near-wavelength laser-induced periodic surface structures (LIPSS) on silicon upon irradiation with sequences of Ti:sapphire femtosecond laser pulse pairs (pulse duration 150 fs, central wavelength 800 nm) is studied theoretically. For this purpose, the nonlinear generation of conduction band electrons in silicon and their relaxation is numerically calculated using a two-temperature model approach including intrapulse changes of optical properties, transport, diffusion and recombination effects. Following the idea that surface plasmon polaritons (SPP) can be excited when the material turns from semiconducting to metallic state, the “SPP active area” is calculated as function of fluence and double-pulse delay up to several picoseconds and compared to the experimentally observed rippled surface areas. Evidence is presented that multi-photon absorption explains the large increase of the rippled area for temporally overlapping pulses. For longer double-pulse delays, relevant relaxation processes are identified. The results demonstrate that femtosecond LIPSS on silicon are caused by the excitation of SPP and can be controlled by temporal pulse shaping.

© 2013 OSA

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(160.6000) Materials : Semiconductor materials
(240.5420) Optics at surfaces : Polaritons
(050.6624) Diffraction and gratings : Subwavelength structures

ToC Category:
Lasers and Laser Optics

Original Manuscript: September 17, 2013
Revised Manuscript: October 23, 2013
Manuscript Accepted: October 27, 2013
Published: November 22, 2013

Thibault J.-Y. Derrien, Jörg Krüger, Tatiana E. Itina, Sandra Höhm, Arkadi Rosenfeld, and Jörn Bonse, "Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon," Opt. Express 21, 29643-29655 (2013)

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