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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 24 — Dec. 2, 2013
  • pp: 29894–29904

Short period La/B and LaN/B multilayer mirrors for ~6.8 nm wavelength

Igor A. Makhotkin, Erwin Zoethout, Robbert van de Kruijs, Sergey N. Yakunin, Eric Louis, A. M. Yakunin, V. Banine, S. Müllender, and Fred Bijkerk  »View Author Affiliations


Optics Express, Vol. 21, Issue 24, pp. 29894-29904 (2013)
http://dx.doi.org/10.1364/OE.21.029894


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Abstract

In the first part of this article we experimentally show that contrast between the very thin layers of La and B enables close to theoretical reflectance. The reflectivity at 6.8 nm wavelength was measured from La/B multilayer mirrors with period thicknesses ranging from 3.5 to 7.2 nm at the appropriate angle for constructive interference. The difference between the measured reflectance and the reflectance calculated for a perfect multilayer structure decreases with increasing multilayer period. The reflectance of the multilayer with the largest period approaches the theoretical value, showing that the optical contrast between the very thin layers of these structures allows to experimentally access close to theoretical reflectance. In the second part of the article we discuss the structure of La/B and LaN/B multilayers. This set of multilayers is probed by hard X-rays (λ = 0.154 nm) and EUV radiation (λ = 6.8 nm). The structure is reconstructed based on a simultaneous fit of the grazing incidence hard X-ray reflectivity and the EUV reflectivity curves. The reflectivity analysis of the La/B and LaN/B multilayer mirrors shows that the lower reflectance of La/B mirrors compared to LaN/B mirrors can be explained by the presence of 5% of La atoms in the B layer and 63% of B in La layer. After multi-parametrical optimization of the LaN/B system, including the nitridation of La, the highest near normal incidence reflectivity of 57.3% at 6.6 nm wavelength has been measured from a multilayer mirror, containing 175 bi-layers. This is the highest value reported so far.

© 2013 Optical Society of America

OCIS Codes
(340.7470) X-ray optics : X-ray mirrors
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
X-ray Optics

History
Original Manuscript: September 13, 2013
Revised Manuscript: November 14, 2013
Manuscript Accepted: November 20, 2013
Published: November 26, 2013

Citation
Igor A. Makhotkin, Erwin Zoethout, Robbert van de Kruijs, Sergey N. Yakunin, Eric Louis, A. M. Yakunin, V. Banine, S. Müllender, and Fred Bijkerk, "Short period La/B and LaN/B multilayer mirrors for ~6.8 nm wavelength," Opt. Express 21, 29894-29904 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-24-29894


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