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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 26 — Dec. 30, 2013
  • pp: 31830–31836

Parallel laser micromachining based on diffractive optical elements with dispersion compensated femtosecond pulses

S. Torres-Peiró, J. González-Ausejo, O. Mendoza-Yero, G. Mínguez-Vega, P. Andrés, and J. Lancis  »View Author Affiliations

Optics Express, Vol. 21, Issue 26, pp. 31830-31836 (2013)

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We experimentally demonstrate multi-beam high spatial resolution laser micromachining with femtosecond pulses. The effects of chromatic aberrations as well as pulse stretching on the material processed due to diffraction were significantly mitigated by using a suited dispersion compensated module (DCM). This permits to increase the area of processing in a factor 3 in comparison with a conventional setup. Specifically, 52 blind holes have been drilled simultaneously onto a stainless steel sample with a 30 fs laser pulse in a parallel processing configuration.

© 2013 Optical Society of America

OCIS Codes
(220.4000) Optical design and fabrication : Microstructure fabrication
(260.1960) Physical optics : Diffraction theory
(320.2250) Ultrafast optics : Femtosecond phenomena
(350.3850) Other areas of optics : Materials processing

ToC Category:
Laser Microfabrication

Original Manuscript: September 27, 2013
Revised Manuscript: November 22, 2013
Manuscript Accepted: November 27, 2013
Published: December 16, 2013

S. Torres-Peiró, J. González-Ausejo, O. Mendoza-Yero, G. Mínguez-Vega, P. Andrés, and J. Lancis, "Parallel laser micromachining based on diffractive optical elements with dispersion compensated femtosecond pulses," Opt. Express 21, 31830-31836 (2013)

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