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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 3 — Feb. 11, 2013
  • pp: 2693–2700

Inclined surfaces in diamond: broadband antireflective structures and coupling light through waveguides

Pontus Forsberg and Mikael Karlsson  »View Author Affiliations

Optics Express, Vol. 21, Issue 3, pp. 2693-2700 (2013)

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Control of the sidewall angle of diamond microstructures was achieved by varying the gas mixture, bias power and mask shape during inductively coupled plasma etching. Different etch mechanisms were responsible for the angle of the lower and upper part of the sidewall formed during diamond etching. These angles could to some extent be controlled separately. The developed etch process was used to fabricate wideband antireflective structures with an average transmission of 96.4% for wavelengths between 10 and 50 µm. Smooth facetted edges for coupling light through waveguides from above were also demonstrated.

© 2013 OSA

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.7370) Optical devices : Waveguides
(240.0240) Optics at surfaces : Optics at surfaces
(050.6624) Diffraction and gratings : Subwavelength structures

ToC Category:
Diffraction and Gratings

Original Manuscript: December 4, 2012
Revised Manuscript: January 18, 2013
Manuscript Accepted: January 19, 2013
Published: January 28, 2013

Pontus Forsberg and Mikael Karlsson, "Inclined surfaces in diamond: broadband antireflective structures and coupling light through waveguides," Opt. Express 21, 2693-2700 (2013)

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