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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 3 — Feb. 11, 2013
  • pp: 2807–2815

Optical beamsteering using an 8 × 8 MEMS phased array with closed-loop interferometric phase control

Trevor K. Chan, Mischa Megens, Byung-Wook Yoo, John Wyras, Connie J. Chang-Hasnain, Ming C. Wu, and David A. Horsley  »View Author Affiliations

Optics Express, Vol. 21, Issue 3, pp. 2807-2815 (2013)

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We present a high-speed optical beamsteering system based on an 8x8 MEMS phased array. The system incorporates an in situ interferometer that provides a real-time, dynamic measure of the phase of each mirror in the array during beamsteering. A closed-loop phase-control algorithm results in <π/100 mirror phase accuracy and far field beam steering is shown. Stroboscopic measurement capabilities are demonstrated which allow us to show feedforward control to eliminate micromirror ringing.

© 2013 OSA

OCIS Codes
(110.5100) Imaging systems : Phased-array imaging systems
(230.6120) Optical devices : Spatial light modulators
(060.2605) Fiber optics and optical communications : Free-space optical communication
(100.3175) Image processing : Interferometric imaging
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:
Optical Devices

Original Manuscript: November 30, 2012
Revised Manuscript: January 17, 2013
Manuscript Accepted: January 22, 2013
Published: January 29, 2013

Trevor K. Chan, Mischa Megens, Byung-Wook Yoo, John Wyras, Connie J. Chang-Hasnain, Ming C. Wu, and David A. Horsley, "Optical beamsteering using an 8 × 8 MEMS phased array with closed-loop interferometric phase control," Opt. Express 21, 2807-2815 (2013)

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