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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 4 — Feb. 25, 2013
  • pp: 3946–3958

Femtosecond versus picosecond laser machining of nano-gratings and micro-channels in silica glass

Costantino Corbari, Audrey Champion, Mindaugas Gecevičius, Martynas Beresna, Yves Bellouard, and Peter G. Kazansky  »View Author Affiliations


Optics Express, Vol. 21, Issue 4, pp. 3946-3958 (2013)
http://dx.doi.org/10.1364/OE.21.003946


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Abstract

The ability of 8 picosecond pulse lasers for three dimensional direct-writing in the bulk of transparent dielectrics is assessed through a comparative study with a femtosecond laser delivering 600 fs pulses. The comparison addresses two main applications: the fabrication of birefringent optical elements and two-step machining by laser exposure and post-processing by chemical etching. Formation of self-organized nano-gratings in glass by ps-pulses is demonstrated. Differential etching between ps-laser exposed regions and unexposed silica is observed. Despite attaining values of retardance (>100 nm) and etching rate (2 μm/min) similar to fs pulses, ps pulses are found unsuitable for bulk machining in silica glass primarily due to the build-up of a stress field causing scattering, cracks and non-homogeneous etching. Additionally, we show that the so-called “quill-effect”, that is the dependence of the laser damage from the direction of writing, occurs also for ps-pulse laser machining. Finally, an opposite dependence of the retardance from the intra-pulse distance is observed for fs- and ps-laser direct writing.

© 2013 OSA

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(140.7090) Lasers and laser optics : Ultrafast lasers
(160.6030) Materials : Silica

ToC Category:
Laser Microfabrication

History
Original Manuscript: August 13, 2012
Revised Manuscript: September 27, 2012
Manuscript Accepted: October 8, 2012
Published: February 11, 2013

Citation
Costantino Corbari, Audrey Champion, Mindaugas Gecevičius, Martynas Beresna, Yves Bellouard, and Peter G. Kazansky, "Femtosecond versus picosecond laser machining of nano-gratings and micro-channels in silica glass," Opt. Express 21, 3946-3958 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-4-3946


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