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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 4 — Feb. 25, 2013
  • pp: 4638–4652

Laser heterodyne interferometric signal processing method based on rising edge locking with high frequency clock signal

Enzheng Zhang, Benyong Chen, Liping Yan, Tao Yang, Qun Hao, Wenjun Dong, and Chaorong Li  »View Author Affiliations

Optics Express, Vol. 21, Issue 4, pp. 4638-4652 (2013)

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A novel phase measurement method composed of the rising-edge locked signal processing and the digital frequency mixing is proposed for laser heterodyne interferometer. The rising-edge locked signal processing, which employs a high frequency clock signal to lock the rising-edges of the reference and measurement signals, not only can improve the steepness of the rising-edge, but also can eliminate the error counting caused by multi-rising-edge phenomenon in fringe counting. The digital frequency mixing is realized by mixing the digital interference signal with a digital base signal that is different from conventional frequency mixing with analogue signals. These signal processing can improve the measurement accuracy and enhance anti-interference and measurement stability. The principle and implementation of the method are described in detail. An experimental setup was constructed and a series of experiments verified the feasibility of the method in large displacement measurement with high speed and nanometer resolution.

© 2013 OSA

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(250.0250) Optoelectronics : Optoelectronics

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: December 12, 2012
Revised Manuscript: February 4, 2013
Manuscript Accepted: February 7, 2013
Published: February 15, 2013

Enzheng Zhang, Benyong Chen, Liping Yan, Tao Yang, Qun Hao, Wenjun Dong, and Chaorong Li, "Laser heterodyne interferometric signal processing method based on rising edge locking with high frequency clock signal," Opt. Express 21, 4638-4652 (2013)

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