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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 4 — Feb. 25, 2013
  • pp: 5063–5070

Optical Fourier transform based in-plane vibration characterization for MEMS comb structure

Yongfeng Gao, Liangcai Cao, Zheng You, Jiahao Zhao, Zichen Zhang, and Jianzhong Yang  »View Author Affiliations

Optics Express, Vol. 21, Issue 4, pp. 5063-5070 (2013)

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On-line and on-wafer characterizations of mechanical properties of Micro-Electro-Mechanical-System (MEMS) with efficiency are very important to the mass production of MEMS foundry in the near future. However, challenges still remain. In this paper, we present an in-plane vibration characterizing method for MEMS comb using optical Fourier transform (OFT). In the experiment, the intensity distribution at the focal plane was captured to characterize the displacement of the vibrator in the MEMS comb structure. A typical MEMS comb was tested to verify the principle. The shape and the movement of MEMS comb was imitated and tested to calibrate the measurement by using a spatial light modulator (SLM). The relative standard deviations (RSD) of the measured displacements were better than 5%, where the RSD is defined as the ratio of the standard deviation to the mean. It is convinced that the presented method is feasible for on-line and on-wafer characterizations for MEMS with great convenience, high efficiency and low cost.

© 2013 OSA

OCIS Codes
(070.0070) Fourier optics and signal processing : Fourier optics and signal processing
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: December 27, 2012
Revised Manuscript: February 8, 2013
Manuscript Accepted: February 8, 2013
Published: February 21, 2013

Yongfeng Gao, Liangcai Cao, Zheng You, Jiahao Zhao, Zichen Zhang, and Jianzhong Yang, "Optical Fourier transform based in-plane vibration characterization for MEMS comb structure," Opt. Express 21, 5063-5070 (2013)

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