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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 5 — Mar. 11, 2013
  • pp: 5974–5987

Dark-field microscopic image stitching method for surface defects evaluation of large fine optics

Dong Liu, Shitong Wang, Pin Cao, Lu Li, Zhongtao Cheng, Xin Gao, and Yongying Yang  »View Author Affiliations

Optics Express, Vol. 21, Issue 5, pp. 5974-5987 (2013)

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One of the challenges in surface defects evaluation of large fine optics is to detect defects of microns on surfaces of tens or hundreds of millimeters. Sub-aperture scanning and stitching is considered to be a practical and efficient method. But since there are usually few defects on the large aperture fine optics, resulting in no defects or only one run-through line feature in many sub-aperture images, traditional stitching methods encounter with mismatch problem. In this paper, a feature-based multi-cycle image stitching algorithm is proposed to solve the problem. The overlapping areas of sub-apertures are categorized based on the features they contain. Different types of overlapping areas are then stitched in different cycles with different methods. The stitching trace is changed to follow the one that determined by the features. The whole stitching procedure is a region-growing like process. Sub-aperture blocks grow bigger after each cycle and finally the full aperture image is obtained. Comparison experiment shows that the proposed method is very suitable to stitch sub-apertures that very few feature information exists in the overlapping areas and can stitch the dark-field microscopic sub-aperture images very well.

© 2013 OSA

OCIS Codes
(100.0100) Image processing : Image processing
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(150.1835) Machine vision : Defect understanding

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: November 23, 2012
Revised Manuscript: January 27, 2013
Manuscript Accepted: February 5, 2013
Published: March 4, 2013

Dong Liu, Shitong Wang, Pin Cao, Lu Li, Zhongtao Cheng, Xin Gao, and Yongying Yang, "Dark-field microscopic image stitching method for surface defects evaluation of large fine optics," Opt. Express 21, 5974-5987 (2013)

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