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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 5 — Mar. 11, 2013
  • pp: 6101–6108

Silicon-on-insulator spectrometers with integrated GaInAsSb photodiodes for wide-band spectroscopy from 1510 to 2300 nm

E. Ryckeboer, A. Gassenq, M. Muneeb, N. Hattasan, S. Pathak, L. Cerutti, J.B. Rodriguez, E. Tournié, W. Bogaerts, R. Baets, and G. Roelkens  »View Author Affiliations

Optics Express, Vol. 21, Issue 5, pp. 6101-6108 (2013)

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We present a silicon-on-insulator (SOI) based spectrometer platform for a wide operational wavelength range. Both planar concave grating (PCG, also known as echelle grating) and arrayed waveguide grating (AWG) spectrometer designs are explored for operation in the short-wave infrared. In addition, a total of four planar concave gratings are designed to cover parts of the wavelength range from 1510 to 2300 nm. These passive wavelength demultiplexers are combined with GaInAsSb photodiodes. These photodiodes are heterogeneously integrated on SOI with benzocyclobutene (DVS-BCB) as an adhesive bonding layer. The uniformity of the photodiode characteristics and high processing yield, indicate a robust fabrication process. We demonstrate good performance of the miniature spectrometers over all operational wavelengths which paves the way to on-chip absorption spectroscopy in this wavelength range.

© 2013 OSA

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(300.6190) Spectroscopy : Spectrometers

ToC Category:

Original Manuscript: January 8, 2013
Revised Manuscript: February 20, 2013
Manuscript Accepted: February 25, 2013
Published: March 4, 2013

E. Ryckeboer, A. Gassenq, M. Muneeb, N. Hattasan, S. Pathak, L. Cerutti, J.B. Rodriguez, E. Tournié, W. Bogaerts, R. Baets, and G. Roelkens, "Silicon-on-insulator spectrometers with integrated GaInAsSb photodiodes for wide-band spectroscopy from 1510 to 2300 nm," Opt. Express 21, 6101-6108 (2013)

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  1. M. C. Estevez, M. Alvarez, and L. M. Lechuga, “Integrated optical devices for lab-on-a-chip biosensing applications,” Laser Photon. Rev.6(4), 463–487 (2012). [CrossRef]
  2. K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-insulator microring resonator for sensitive and label-free biosensing,” Opt. Express15(12), 7610–7615 (2007). [CrossRef] [PubMed]
  3. J. Brouckaert, W. Bogaerts, S. Selvaraja, P. Dumon, R. Baets, and D. Van Thourhout, “Planar concave grating demultiplexer with high reflective bragg reflector facets,” IEEE Photon. Technol. Lett.20(4), 309–311 (2008). [CrossRef]
  4. W. Bogaerts, S. Selvaraja, P. Dumon, J. Brouckaert, K. De Vos, D. Van Thourhout, and R. Baets, “Silicon-on-insulator spectral filters fabricated with CMOS technology,” IEEE J. Sel. Top. Quantum Electron.16(1), 33–44 (2010). [CrossRef]
  5. J. G. Crowder, S. D. Smith, A. Vass, and J. Keddie, “Infrared methods for gas detection,” Mid-Infrared Semiconductor Optoelectronics. (Springer-Verlag, 2006). [CrossRef]
  6. A. Amerov, J. Chen, and M. Arnold, “Molar absorptivities of glucose and other biological molecules in aqueous solutions over the first overtone and combination regions of the near-infrared spectrum,” Appl. Spectrosc.58(10), 1195–1204 (2004). [CrossRef] [PubMed]
  7. A. Gassenq, N. Hattasan, E. M.P. Ryckeboer, J.B. Rodriguez, L. Cerutti, E. Tournié, and G. Roelkens, “Study of evanescently-coupled and grating-assisted GaInAsSb photodiodes integrated on a silicon photonic chip,” Opt. Express20(11), 11665–11672 (2012). [CrossRef] [PubMed]
  8. http://www.epixfab.eu/ .
  9. M. K. Smit and C. Van Dam, “Phasar-based wdm-devices: principles, design and applications,” IEEE J. Sel. Top. Quantum Electron.2(2), 236–250 (1996). [CrossRef]
  10. R. Marz, Integrated Optics, Design and Modeling. (Artech House Inc., 1994).
  11. J. Brouckaert, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, “Planar concave grating demultiplexer fabricated on a nanophotonic silicon-on-insulator platform,” J. Lightwave Technol.25(5), 1269–1275 (2007). [CrossRef]
  12. A. C. Bedoya, M. Y. Ling, J. Brouckaert, N. A. Yebo, D. Van Thourhout, and R. Baets, “Biodiesel sensing using silicon-on-insulator technologies,” Proc. SPIE, 7366, (2009).
  13. G. J. Veldhuis, O. Parriaux, H. Hoekstra, and P. V. Lambeck, “Sensitivity enhancement in evanescent optical waveguide sensors,” J. Lightwave Technol.18(5), 677–682 (2000). [CrossRef]
  14. A. Bauer, K. Rner, T. Lehnhardt, M. Kamp, S. Hfling, L. Worschech, and A. Forchel, “Mid-infrared semiconductor heterostructure lasers for gas sensing applications,” Semicond. Sci. Technol.26(1), 4032 (2011). [CrossRef]

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