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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 5 — Mar. 11, 2013
  • pp: 6286–6294

Chromatic confocal microscopy with a novel wavelength detection method using transmittance

Taejoong Kim, Sang Hoon Kim, DukHo Do, Hongki Yoo, and DaeGab Gweon  »View Author Affiliations

Optics Express, Vol. 21, Issue 5, pp. 6286-6294 (2013)

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Chromatic confocal microscopy (CCM) is a promising technology that enables high-speed three-dimensional surface profiling without mechanical depth scanning. However, the spectrometer, which measures depth information encoded by axial color, limits the speed of three-dimensional imaging. We present a novel method for chromatic confocal microscopy with transmittance detection. Depth information can be instantaneously obtained by the ratio of intensity signals from two photomultiplier tubes by detecting a peak wavelength using transmittance of a color filter. This non-destructive and high-speed surface profiling method might be useful in many fields, including the semiconductor and flat panel display industries, and in material science.

© 2013 OSA

OCIS Codes
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(180.1790) Microscopy : Confocal microscopy
(180.6900) Microscopy : Three-dimensional microscopy

ToC Category:

Original Manuscript: January 2, 2013
Revised Manuscript: January 29, 2013
Manuscript Accepted: February 25, 2013
Published: March 5, 2013

Virtual Issues
Vol. 8, Iss. 4 Virtual Journal for Biomedical Optics

Taejoong Kim, Sang Hoon Kim, DukHo Do, Hongki Yoo, and DaeGab Gweon, "Chromatic confocal microscopy with a novel wavelength detection method using transmittance," Opt. Express 21, 6286-6294 (2013)

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