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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 5 — Mar. 11, 2013
  • pp: 6391–6400

Glancing angle deposited nanostructured film Fabry-Perot etalons for optical detection of ultrasound

Parsin Hajireza, Kathleen Krause, Michael Brett, and Roger Zemp  »View Author Affiliations

Optics Express, Vol. 21, Issue 5, pp. 6391-6400 (2013)

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In this paper a new class of optical Fabry-Perot-based ultrasound detectors using low acoustic impedance glancing angle deposited (GLAD) films is demonstrated. GLAD is a single-step physical vapor-deposition (PVD) technique used to fabricate porous nanostructured thin films. Using titanium dioxide (TiO2), a transparent semiconductor with a high refractive index (n = 2.4), the GLAD technique can be employed to fabricate samples with tailored nano-porosity, refractive index periodicities, and high Q-factor reflectance spectra. The average acoustic impedance of the porous films is lower than bulk materials which will improve acoustic coupling, especially for high acoustic frequencies. For this work, two filters with high reflection in the C-band range and high transparency in the visible range (~80%) using GLAD films were fabricated. A 23 µm Parylene C layer was sandwiched between these two GLAD films in order to form a GLAD Fabry Perot Interferometer (GLAD-FPI). A high speed tunable continuous wavelength C-band laser was focused at the FPI and the reflection was measured using a high speed photodiode. The ultrasound pressure modulated the optical thickness of the FPI and hence its reflectivity. The fabricated sensor was tested using a 10 MHz unfocused transducer. The ultrasound transducer was calibrated using a hydrophone. The minimum detectable acoustic pressure was measured as 80 ± 20 Pa and the −3dB bandwidth was measured to be 18 MHz. This ultra-sensitive sensor can be an alternative to piezoelectric ultrasound transducers for any techniques in which ultrasound waves need to be detected including ultrasonic and photoacoustic imaging modalities. We demonstrate our GLAD-FPI for photoacoustic signal detection in optical-resolution photoacoustic microscopy (OR-PAM). To the best of our knowledge, this is the first time that a FPI fabricated using the GLAD method has been used for ultra-sensitive ultrasound detection.

© 2013 OSA

OCIS Codes
(110.5120) Imaging systems : Photoacoustic imaging
(170.3880) Medical optics and biotechnology : Medical and biological imaging
(180.5810) Microscopy : Scanning microscopy
(220.4241) Optical design and fabrication : Nanostructure fabrication
(280.4788) Remote sensing and sensors : Optical sensing and sensors
(310.6845) Thin films : Thin film devices and applications

ToC Category:

Original Manuscript: January 7, 2013
Revised Manuscript: February 21, 2013
Manuscript Accepted: February 22, 2013
Published: March 6, 2013

Virtual Issues
Vol. 8, Iss. 4 Virtual Journal for Biomedical Optics

Parsin Hajireza, Kathleen Krause, Michael Brett, and Roger Zemp, "Glancing angle deposited nanostructured film Fabry-Perot etalons for optical detection of ultrasound," Opt. Express 21, 6391-6400 (2013)

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