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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 5 — Mar. 11, 2013
  • pp: 6625–6632

Tilt-ellipsometry of object surface by specular reflection for three-dimensional shape measurement

Toshihide Tsuru  »View Author Affiliations

Optics Express, Vol. 21, Issue 5, pp. 6625-6632 (2013)

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Ellipsometry by specular reflection has been reworked as a precise surface normal vector detection method for the geometrical shape study of a glossy object. When the object is illuminated by circularly polarized light, the surface normal vector defines the shape of the reflection polarization ellipse; the azimuth and ellipticity are determined by the angle of the incident plane and the angle of incidence, respectively. The tilt-ellipsometry principle of tilt detection is demonstrated experimentally with a metallic polygon and a cube sample.

© 2013 OSA

OCIS Codes
(100.6890) Image processing : Three-dimensional image processing
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(150.6910) Machine vision : Three-dimensional sensing
(280.4788) Remote sensing and sensors : Optical sensing and sensors

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: January 16, 2013
Revised Manuscript: March 1, 2013
Manuscript Accepted: March 1, 2013
Published: March 8, 2013

Toshihide Tsuru, "Tilt-ellipsometry of object surface by specular reflection for three-dimensional shape measurement," Opt. Express 21, 6625-6632 (2013)

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