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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 7 — Apr. 8, 2013
  • pp: 7868–7874

CMOS-compatible high efficiency double-etched apodized waveguide grating coupler

Chao Li, Huijuan Zhang, Mingbin Yu, and G. Q. Lo  »View Author Affiliations


Optics Express, Vol. 21, Issue 7, pp. 7868-7874 (2013)
http://dx.doi.org/10.1364/OE.21.007868


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Abstract

We present a high efficiency double-etched apodized fiber-to-waveguide grating coupler on a silicon-on-insulator substrate, which can be fabricated using deep UV photolithography. The fabricated grating coupler yields a coupling loss of −1.5 dB with 3-dB bandwidth of 54 nm at a wavelength of 1560 nm. Measurements and simulations show that the double-etched apodized grating coupler design is robust and tolerant to fabrication process variations.

© 2013 OSA

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(130.3120) Integrated optics : Integrated optics devices
(250.5300) Optoelectronics : Photonic integrated circuits

ToC Category:
Integrated Optics

History
Original Manuscript: December 12, 2012
Revised Manuscript: January 11, 2013
Manuscript Accepted: January 15, 2013
Published: March 25, 2013

Citation
Chao Li, Huijuan Zhang, Mingbin Yu, and G. Q. Lo, "CMOS-compatible high efficiency double-etched apodized waveguide grating coupler," Opt. Express 21, 7868-7874 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-7-7868


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References

  1. W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, “Nanophotonic waveguide in silicon-on-insulator fabricated with CMOS technology,” J. Lightwave Technol.23(1), 401–412 (2005). [CrossRef]
  2. D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron.38(7), 949–955 (2002). [CrossRef]
  3. D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys.45(8A), 6071–6077 (2006). [CrossRef]
  4. B. Wang, J. H. Jiang, and G. P. Nordin, “Embedded, slanted grating for vertical coupling between fibers and silicon-on-insulator planar waveguides,” IEEE Photon. Technol. Lett.17(9), 1884–1886 (2005). [CrossRef]
  5. F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol.25(1), 151–156 (2007). [CrossRef]
  6. D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform,” Opt. Express18(17), 18278–18283 (2010). [CrossRef] [PubMed]
  7. D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett.29(23), 2749–2751 (2004). [CrossRef] [PubMed]
  8. X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, and H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett.22(15), 1156–1158 (2010). [CrossRef]
  9. M. Antelius, K. B. Gylfason, and H. Sohlström, “An apodized SOI waveguide-to-fiber surface grating coupler for single lithography silicon photonics,” Opt. Express19(4), 3592–3598 (2011). [CrossRef] [PubMed]
  10. R. Halir, P. Cheben, S. Janz, D.-X. Xu, I. Molina-Fernández, and J. G. Wangüemert-Pérez, “Waveguide grating coupler with subwavelength microstructures,” Opt. Lett.34(9), 1408–1410 (2009). [CrossRef] [PubMed]
  11. C. Alonso-Ramos, A. Ortega-Moñux, L. Zavargo-Peche, R. Halir, J. de Oliva-Rubio, Í. Molina-Fernández, P. Cheben, D.-X. Xu, S. Janz, N. Kim, and B. Lamontagne, “Single-etch grating coupler for micrometric silicon rib waveguides,” Opt. Lett.36(14), 2647–2649 (2011). [CrossRef] [PubMed]
  12. A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. De Dobbelaere, “A Grating-Coupler-Enabled CMOS Photonics Platform,” IEEE J. Sel. Top. Quantum Electron.17(3), 597–608 (2011). [CrossRef]
  13. T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3μm square Si wire waveguides to singlemode fibres,” Electron. Lett.38(25), 1669–1670 (2002). [CrossRef]
  14. V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett.28(15), 1302–1304 (2003). [CrossRef] [PubMed]
  15. A. Delâge, S. Janz, B. Lamontagne, A. Bogdanov, D. Dalacu, D.-X. Xu, and K. P. Yap, “Monolithically integrated asymmetric graded and step-index couplers for microphotonic waveguides,” Opt. Express14(1), 148–161 (2006). [CrossRef] [PubMed]
  16. Q. Fang, J. Song, X. Luo, M. Yu, G. Lo, and Y. Liu, “Mode-size converter with high coupling efficiency and broad bandwidth,” Opt. Express19(22), 21588–21594 (2011). [CrossRef] [PubMed]

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