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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 8 — Apr. 22, 2013
  • pp: 9584–9591

Sub-micrometer soft lithography of a bulk chalcogenide glass

Tomas Kohoutek, Jiri Orava, A. Lindsay Greer, and Hiroshi Fudouzi  »View Author Affiliations

Optics Express, Vol. 21, Issue 8, pp. 9584-9591 (2013)

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We demonstrate, for the first time, time- and cost-effective replication of sub-micrometer features from a soft PDMS mold onto a bulk chalcogenide glass over a large surface area. A periodic array of sub-micrometer lines (diffraction grating) with period 625 nm, amplitude 45 nm and surface roughness 3 nm was imprinted onto the surface of the chalcogenide AsSe2 bulk glass at temperature 225°C, i.e. 5°C below the softening point of the glass. Sub-micrometer soft lithography into chalcogenide bulk glasses shows good reliability, reproducibility and promise for feasible fabrication of various dispersive optical elements, anti-reflection surfaces, 2D photonic structures and nano-structured surfaces for enhanced photonic properties and chemical sensing.

© 2013 OSA

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(160.2750) Materials : Glass and other amorphous materials
(350.3850) Other areas of optics : Materials processing

ToC Category:
Diffraction and Gratings

Original Manuscript: January 22, 2013
Revised Manuscript: March 21, 2013
Manuscript Accepted: March 22, 2013
Published: April 10, 2013

Tomas Kohoutek, Jiri Orava, A. Lindsay Greer, and Hiroshi Fudouzi, "Sub-micrometer soft lithography of a bulk chalcogenide glass," Opt. Express 21, 9584-9591 (2013)

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