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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 8 — Apr. 22, 2013
  • pp: 9780–9791

Frequency-comb-referenced multi-wavelength profilometry for largely stepped surfaces

Sangwon Hyun, Minah Choi, Byung Jae Chun, Seungman Kim, Seung-Woo Kim, and Young-Jin Kim  »View Author Affiliations

Optics Express, Vol. 21, Issue 8, pp. 9780-9791 (2013)

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3-D profiles of discontinuous surfaces patterned with high step structures are measured using four wavelengths generated by phase-locking to the frequency comb of an Er-doped fiber femtosecond laser stabilized to the Rb atomic clock. This frequency-comb-referenced method of multi-wavelength interferometry permits extending the phase non-ambiguity range by a factor of 64,500 while maintaining the sub-wavelength measurement precision of single-wavelength interferometry. Experimental results show a repeatability of 3.13 nm (one-sigma) in measuring step heights of 1800, 500, and 70 μm. The proposed method is accurate enough for the standard calibration of gauge blocks and also fast to be suited for the industrial inspection of microelectronics products.

© 2013 OSA

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(140.7090) Lasers and laser optics : Ultrafast lasers

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: February 20, 2013
Revised Manuscript: March 25, 2013
Manuscript Accepted: April 10, 2013
Published: April 12, 2013

Sangwon Hyun, Minah Choi, Byung Jae Chun, Seungman Kim, Seung-Woo Kim, and Young-Jin Kim, "Frequency-comb-referenced multi-wavelength profilometry for largely stepped surfaces," Opt. Express 21, 9780-9791 (2013)

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