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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 8 — Apr. 22, 2013
  • pp: 9923–9930

Investigations of morphology and formation mechanism of laser-induced annular/droplet-like structures on SiGe film

Dongfeng Qi, Hanhui Liu, Wei Gao, Songyan Chen, Cheng Li, Hongkai Lai, Wei Huang, and Jun Li  »View Author Affiliations


Optics Express, Vol. 21, Issue 8, pp. 9923-9930 (2013)
http://dx.doi.org/10.1364/OE.21.009923


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Abstract

We describe the fabrication of nanostructures on SiGe film by KrF excimer laser with nanosecond pulse width, and find a more direct and clear relationship between the laser irradiation conditions and the nanoscale structures. Perfect annular nanostructures around scattering points on the SiGe film are firstly obtained after the irradiation of a KrF excimer pulse laser beam (100 mJ/cm2) at different incident angles. The different shapes of annular structures are related to different energy distributions due to the optical interference between the scattered light and the incident beam. As laser energy increases, a threshold of pulse energy (230 mJ/cm2) is found, above which a droplet-like morphology completely replacing the surface annular structures. And the disorder morphology is mainly caused by the thermal effect of the incident beam.

© 2013 OSA

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(240.0240) Optics at surfaces : Optics at surfaces
(260.3160) Physical optics : Interference
(310.6628) Thin films : Subwavelength structures, nanostructures

ToC Category:
Laser Microfabrication

History
Original Manuscript: January 22, 2013
Revised Manuscript: March 15, 2013
Manuscript Accepted: March 19, 2013
Published: April 15, 2013

Citation
Dongfeng Qi, Hanhui Liu, Wei Gao, Songyan Chen, Cheng Li, Hongkai Lai, Wei Huang, and Jun Li, "Investigations of morphology and formation mechanism of laser-induced annular/droplet-like structures on SiGe film," Opt. Express 21, 9923-9930 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-8-9923


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