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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 9 — May. 6, 2013
  • pp: 11391–11403

Common-path design criteria for laser datum based measurement of small angle deviations and laser autocollimation method in compliance with the criteria with high accuracy and stability

Fan Zhu, Jiubin Tan, and Jiwen Cui  »View Author Affiliations


Optics Express, Vol. 21, Issue 9, pp. 11391-11403 (2013)
http://dx.doi.org/10.1364/OE.21.011391


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Abstract

Common-path design criteria for laser datum based measurement of small angle deviations are proposed to guide the implementation of common-path principle in dealing with laser beam drifts resulting from laser generation mechanism and instability of beam transmission medium. A laser autocollimation method is designed in compliance with the criteria, and can achieve an accuracy of 0.013arcsec and a two-hour stability of 0.020arcsec over a measurement distance of two meters. The criteria and the method proposed can be effectively used for laser datum based measurement of small angle deviations with high accuracy and stability, especially over a long measurement distance.

© 2013 OSA

OCIS Codes
(000.3110) General : Instruments, apparatus, and components common to the sciences
(120.1680) Instrumentation, measurement, and metrology : Collimation
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.4640) Instrumentation, measurement, and metrology : Optical instruments

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: April 5, 2013
Manuscript Accepted: April 23, 2013
Published: May 2, 2013

Citation
Fan Zhu, Jiubin Tan, and Jiwen Cui, "Common-path design criteria for laser datum based measurement of small angle deviations and laser autocollimation method in compliance with the criteria with high accuracy and stability," Opt. Express 21, 11391-11403 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-9-11391


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References

  1. D. Luo, C. Kuang, X. Hao, and X. Liu, “High-precision laser alignment technique based on spiral phase plate,” Opt. Lasers Eng.50(7), 944–949 (2012). [CrossRef]
  2. Q. Hao, D. Li, and Y. Wang, “High-accuracy long distance alignment using single-mode optical fiber and phase plate,” Opt. Laser Technol.34(4), 287–292 (2002). [CrossRef]
  3. C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, and Z. Zhang, “A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module,” Sens. Actuators A Phys.125(1), 100–108 (2005). [CrossRef]
  4. Q. Feng, B. Zhang, and C. Kuang, “A straightness measurement system using a single-mode fiber-coupled laser module,” Opt. Laser Technol.36(4), 279–283 (2004). [CrossRef]
  5. W. Zhao, J. Tan, L. Qiu, L. Zou, J. Cui, and Z. Shi, “Enhancing laser beam directional stability by single-mode optical fiber and feedback control of drifts,” Rev. Sci. Instrum.76(3), 036101 (2005). [CrossRef]
  6. W. Zhao, L. Qiu, Z. Feng, and C. Li, “Laser beam alignment by fast feedback control of both linear and angular drifts,” Optik (Stuttg.)117(11), 505–510 (2006). [CrossRef]
  7. S. C. Irick, W. R. McKinney, D. L. J. Lunt, and P. Z. Takacs, “Using a straightness reference in obtaining more accurate surface profiles from a long trace profiler,” Rev. Sci. Instrum.63(1), 1436–1438 (1992). [CrossRef]
  8. S. Qian, K. Qian, Y. Hong, L. Sheng, T. Ho, and P. Takacs, “Systematic error reduction: non-tilted reference beam method for Long Trace Profiler,” Proc. SPIE6704, 67040I, 67040I-7 (2007). [CrossRef]
  9. K. Li, C. Kuang, and X. Liu, “Small angular displacement measurement based on an autocollimator and a common-path compensation principle,” Rev. Sci. Instrum.84(1), 015108 (2013). [CrossRef] [PubMed]
  10. H. H. Sakuma and H. Wada, “Straigtness measurement using a heterodyne moiré method,” Precis. Eng.9(1), 19–22 (1987). [CrossRef]
  11. J. Uchikoshi, S. Shimada, N. Ikawa, and A. Komura, “Straigtness measurement using laser beam straight datum,” Proc. SPIE2576, 315–322 (1995). [CrossRef]
  12. X. Jiang, K. Wang, and H. Martin, “Near common-path optical fiber interferometer for potentially fast on-line microscale-nanoscale surface measurement,” Opt. Lett.31(24), 3603–3605 (2006). [CrossRef] [PubMed]
  13. J. He, F. Li, L. Feng, H. Xiao, and Y. Liu, “Elimination of environmental noise in interferometric wavelength shift demodulation for dynamic fiber Bragg grating sensor array,” Opt. Commun.282(14), 2836–2840 (2009). [CrossRef]
  14. D. Lin, Z. Yue, N. Song, Y. Meng, and C. Yin, “A double common-path heterodyne interferometer for the measurement of flying height modulation,” Meas. Sci. Technol.19(5), 055303 (2008). [CrossRef]
  15. H. Zhao, R. Liang, D. Li, and M. Cao, “Practical common-path heterodyne surface profiling interferometer with automatic focusing,” Opt. Laser Technol.33(4), 259–265 (2001). [CrossRef]
  16. C. Yin and J. Guo, “Novel comprehension of “common path” principle,” Opt. Lasers Eng.43(10), 1081–1095 (2005). [CrossRef]
  17. J. S. Beggs, “Mirror-Image Kinematics,” J. Opt. Soc. Am.50(4), 388–393 (1960). [CrossRef]

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