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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 9 — May. 6, 2013
  • pp: 11506–11515

Mlines characterization of the refractive index profile of SiGe gradient waveguides at 2.15 µm

Pierre Barritault, Mickael Brun, Pierre Labeye, Olivier Lartigue, Jean-Michel Hartmann, and Sergio Nicoletti  »View Author Affiliations


Optics Express, Vol. 21, Issue 9, pp. 11506-11515 (2013)
http://dx.doi.org/10.1364/OE.21.011506


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Abstract

SiGe alloys present a large Infra-Red transparency window and a full compatibility with the standard Complementary Metal Oxide Semiconductor processing making them suitable for applications in integrated optics. In this paper we report on Mlines characterization of Si1-xGex graded index waveguides at 2.15 µm. First, a law giving the refractive index of a Si1-xGex alloy as a function of the Ge content x: n = 1.342x2 + 0.295x + 3.451, has been experimentally established in the 0 < x < 0.4 range. Then, we have demonstrated that our methodology based on Mlines measurements can be used as short-loop non-destructive technique to provide feedback for sample growth.

© 2013 OSA

OCIS Codes
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(130.3060) Integrated optics : Infrared
(130.3130) Integrated optics : Integrated optics materials
(160.4760) Materials : Optical properties
(230.7390) Optical devices : Waveguides, planar

ToC Category:
Integrated Optics

History
Original Manuscript: February 21, 2013
Revised Manuscript: March 12, 2013
Manuscript Accepted: March 15, 2013
Published: May 3, 2013

Citation
Pierre Barritault, Mickael Brun, Pierre Labeye, Olivier Lartigue, Jean-Michel Hartmann, and Sergio Nicoletti, "Mlines characterization of the refractive index profile of SiGe gradient waveguides at 2.15 µm," Opt. Express 21, 11506-11515 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-9-11506


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