Direct electrical contact of slanted ITO film on axial p-n junction silicon nanowire solar cells

doi:10.1364/OE.21.0000A7

Direct electrical contact of slanted ITO film on axial p-n junction silicon nanowire solar cells

Ya-Ju Lee, Yung-Chi Yao, and Chia-Hao Yang »View Author Affiliations

Optics Express, Vol. 21, Issue S1, pp. A7-A14 (2013)
http://dx.doi.org/10.1364/OE.21.0000A7

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Abstract

A novel scheme of direct electrical contact on vertically aligned silicon nanowire (SiNW) axial p-n junction is demonstrated by means of oblique-angle deposition of slanted indium-tin-oxide (ITO) film for photovoltaic applications. The slanted ITO film exhibits an acceptable resistivity of 1.07x10⁻³Ω-cm underwent RTA treatment of T = 450°C, and the doping concentration and carrier mobility by Hall measurement amount to 3.7x10²⁰cm⁻³ and 15.8cm²/V-s, respectively, with an n-type doping polarity. Because of the shadowing effect provided by the SiNWs, the incident ITO vapor-flow is deposited preferentially on the top of SiNWs, which coalesces and eventually forms a nearly continuous film for the subsequent fabrication of grid electrode. Under AM 1.5G normal illumination, our axial p-n junction SiNW solar cell exhibits an open circuit voltage of V_OC = 0.56V, and a short circuit current of J_SC = 1.54 mA/cm² with a fill factor of FF = 30%, resulting in a total power conversion efficiency of PEC = 0.26%.

OCIS Codes
(040.5350) Detectors : Photovoltaic
(310.1210) Thin films : Antireflection coatings
(220.4241) Optical design and fabrication : Nanostructure fabrication
(310.7005) Thin films : Transparent conductive coatings

ToC Category:
Photovoltaics

History
Original Manuscript: September 26, 2012
Revised Manuscript: October 23, 2012
Manuscript Accepted: November 5, 2012
Published: November 9, 2012

Citation
Ya-Ju Lee, Yung-Chi Yao, and Chia-Hao Yang, "Direct electrical contact of slanted ITO film on axial p-n junction silicon nanowire solar cells," Opt. Express 21, A7-A14 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-S1-A7

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References

L. Tsakalakos, “Nanostructures for photovoltaics,” Mater. Sci. Eng.62(6), 175–189 (2008). [CrossRef]
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J. Zhu, C.-M. Hsu, Z. Yu, S. Fan, and Y. Cui, “Nanodome solar cells with efficient light management and self-cleaning,” Nano Lett.10(6), 1979–1984 (2010). [CrossRef] [PubMed]
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S. M. Wong, H. Y. Yu, J. S. Li, G. Zhang, G. Q. Lo, and D. L. Kwong, “Design high-efficiency Si nanopillar-array-textured thin-film solar cell,” IEEE Electron Device Lett.31(4), 335–337 (2010). [CrossRef]
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X. Li and P. W. Bohn, “Metal-assisted chemical etching in HF/H2 O2 produces porous silicon,” Appl. Phys. Lett.77(16), 2572 (2000). [CrossRef]
K. Peng, X. Wang, and S. T. Lee, “Silicon nanowire array photoelectrochemical solar cells,” Appl. Phys. Lett.92(16), 163103 (2008). [CrossRef]
K. Robbie, J. C. Sit, and M. J. Brett, “Advanced techniques for glancing angle deposition,” J. Vac. Sci. Technol. B16(3), 1115–1122 (1998). [CrossRef]
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M. I. Mendelson, “Average grain size in polycrystalline ceramics,” J. Am. Ceram. Soc.52(8), 443–446 (1969). [CrossRef]
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Y.-C. Yao, M.-T. Tsai, H.-C. Hsu, L.-W. She, C.-M. Cheng, Y.-C. Chen, C.-J. Wu, and Y.-J. Lee, “Use of two-dimensional nanorod arrays with slanted ITO film to enhance optical absorption for photovoltaic applications,” Opt. Express20(4), 3479–3489 (2012). [CrossRef] [PubMed]
D. H. Macdonald, A. Cuevas, M. J. Kerr, C. Samundsett, D. Ruby, S. Winderbaum, and A. Leo, “Texturing industrial multicrystalline silicon solar cells,” Sol. Energy76(1-3), 277–283 (2004). [CrossRef]
M. Born and E. Wolf, Principles of optics 7th edition. Cambridge University Press, Cambridge, U.K., 46 (1999).
I. Tobı’as, C. del Can˜izo, J. Alonso, Handbook of Photovoltaic Science and Engineering (Wiley, New York, 2004).
M. A. Green, Solar Cells: Operating Principles, Technology and System Applications (Prentice-Hall, Englewood Cliffs, New Jersey, 1982).

Acet, M.
Andrä, G.
Atwater, H. A.
Aydil, E. S.
Balch, J.
Baxter, J. B.
Boettcher, S. W.
Bohn, P. W.
Brett, M. J.
Carl, A.
Chen, Y.-C.
Cheng, C.-M.
Chhajed, S.
Chiu, C.-H.
Christiansen, S.
Cuevas, A.
Cui, Y.
Delsol, R.
Dimitriev, O. P.
Dong, G.
Durrani, Z. A. K.
Falk, F.
Fallahazad, B.
Fan, S.
Fan, Z.
Fang, Y.
Faucherand, P.
Fronheiser, J.
Fthenakis, V. M.
Gargas, D.
Garnett, E. C.
Green, M. A.
Guha, S.
Gunawan, O.
Gupta, M. C.
Hadobás, K.
Hasan, M. M.
He, H.
Hochbaum, A. I.
Hsu, C.-M.
Hsu, H.-C.
Huang, J.
Hwang, Y. J.
Iyengar, V. V.
Jaussaud, C.
Kayes, B. M.
Kelzenberg, M. D.
Kempa, T. J.
Kerr, M. J.
Kim, J. K.
Kirsch, S.
Kislyuk, V. V.
Korevaar, B. A.
Krali, E.
Kuo, H.-C.
Kurtin, J.
Kwong, D. L.
Kwong, D.-L.
Lee, S. T.
Lee, Y. J.
Lee, Y.-J.
Leo, A.
Levis, M.
Lewis, N. S.
Li, C. B.
Li, J.
Li, J. S.
Li, X.
Lieber, C. M.
Lin, S.-Y.
Lo, G. Q.
Lo, P. G.-Q.
Lu, T.-C.
Macdonald, D. H.
Maiolo, J. R.
Mendelson, M. I.
Nayak, B. K.
Noël, S.
Ose, E.
Peng, K.
Perraud, S.
Pietsch, M.
Poncet, S.
Putnam, M. C.
Rafiq, M. A.
Rand, J.
Rasool, K.
Repins, I.
Robbie, K.
Rockett, A. A.
Rouvière, E.
Ruby, D.
Samundsett, C.
Schubert, E. F.
Shaheen, S. E.
Shao, J.
She, L.-W.
Sit, J. C.
Spurgeon, J. M.
Stelzner, Th.
Sulima, O.
Sun, X.
Thony, P.
Tian, B.
Torvik, J. T.
Tsai, M.-T.
Tsakalakos, L.
Turner-Evans, D. B.
Tutuc, E.
Wang, K.
Wang, S.-C.
Wang, X.
Warren, E. L.
Wassermann, E. F.
Winderbaum, S.
Wolden, C. A.
Wong, S. M.
Wu, C.-J.
Wu, Y.
Xiao, X.
Xu, Y.
Yan, Y.
Yang, P.
Yang, P. D.
Yao, Y.-C.
Yu, G.
Yu, H.
Yu, H. Y.
Yu, N.
Yu, Z.
Zhang, G.
Zhang, Y.
Zheng, X.
Zhu, J.

Appl. Phys. Lett.

J. Li, H. Yu, S. M. Wong, G. Zhang, X. Sun, P. G.-Q. Lo, and D.-L. Kwong, “S nanopillar array optimization on Si thin films for solar energy harvesting,” Appl. Phys. Lett.95(3), 033102 (2009). [CrossRef]
L. Tsakalakos, J. Balch, J. Fronheiser, B. A. Korevaar, O. Sulima, and J. Rand, “Silicon nanowire solar cells,” Appl. Phys. Lett.91(23), 233117 (2007). [CrossRef]
K. Rasool, M. A. Rafiq, C. B. Li, E. Krali, Z. A. K. Durrani, and M. M. Hasan, “Enhanced electrical and dielectric properties of polymer covered silicon nanowire arrays,” Appl. Phys. Lett.101(2), 023114 (2012). [CrossRef]
X. Li and P. W. Bohn, “Metal-assisted chemical etching in HF/H2 O2 produces porous silicon,” Appl. Phys. Lett.77(16), 2572 (2000). [CrossRef]
K. Peng, X. Wang, and S. T. Lee, “Silicon nanowire array photoelectrochemical solar cells,” Appl. Phys. Lett.92(16), 163103 (2008). [CrossRef]
Y. J. Lee, S.-Y. Lin, C.-H. Chiu, T.-C. Lu, H.-C. Kuo, S.-C. Wang, S. Chhajed, J. K. Kim, and E. F. Schubert, “High output power density from GaN-based two-dimensional nanorod light-emitting diode arrays,” Appl. Phys. Lett.94(14), 141111 (2009). [CrossRef]

Appl. Surf. Sci.

X. Xiao, G. Dong, J. Shao, H. He, and Z. Fan, “Optical and electrical properties of SnO2:Sb thin films deposited by oblique angle deposition,” Appl. Surf. Sci.256(6), 1636–1640 (2010). [CrossRef]

IEEE Electron Device Lett.

S. M. Wong, H. Y. Yu, J. S. Li, G. Zhang, G. Q. Lo, and D. L. Kwong, “Design high-efficiency Si nanopillar-array-textured thin-film solar cell,” IEEE Electron Device Lett.31(4), 335–337 (2010). [CrossRef]

J. Am. Ceram. Soc.

M. I. Mendelson, “Average grain size in polycrystalline ceramics,” J. Am. Ceram. Soc.52(8), 443–446 (1969). [CrossRef]

J. Am. Chem. Soc.

E. C. Garnett and P. Yang, “Silicon nanowire radial p-n junction solar cells,” J. Am. Chem. Soc.130(29), 9224–9225 (2008). [CrossRef] [PubMed]

J. Appl. Phys.

B. M. Kayes, H. A. Atwater, and N. S. Lewis, “Comparison of the device physics principles of planar and radial p-n junction nanorod solar cells,” J. Appl. Phys.97(11), 114302 (2005). [CrossRef]

J. Nanosci. Nanotechnol.

V. V. Kislyuk and O. P. Dimitriev, “Nanorods and nanotubes for solar cells,” J. Nanosci. Nanotechnol.8(1), 131–148 (2008). [CrossRef] [PubMed]

J. Vac. Sci. Technol. A

C. A. Wolden, J. Kurtin, J. B. Baxter, I. Repins, S. E. Shaheen, J. T. Torvik, A. A. Rockett, V. M. Fthenakis, and E. S. Aydil, “Photovoltaic manufacturing: Present status, future prospects, and research needs,” J. Vac. Sci. Technol. A29(3), 030801 (2011). [CrossRef]

J. Vac. Sci. Technol. B

K. Robbie, J. C. Sit, and M. J. Brett, “Advanced techniques for glancing angle deposition,” J. Vac. Sci. Technol. B16(3), 1115–1122 (1998). [CrossRef]

Mater. Sci. Eng.

L. Tsakalakos, “Nanostructures for photovoltaics,” Mater. Sci. Eng.62(6), 175–189 (2008). [CrossRef]

Nano Lett.

J. Zhu, C.-M. Hsu, Z. Yu, S. Fan, and Y. Cui, “Nanodome solar cells with efficient light management and self-cleaning,” Nano Lett.10(6), 1979–1984 (2010). [CrossRef] [PubMed]
A. I. Hochbaum, D. Gargas, Y. J. Hwang, and P. D. Yang, “Single crystalline mesoporous silicon nanowires,” Nano Lett.9(10), 3550–3554 (2009). [CrossRef] [PubMed]

Nanotechnology

K. Hadobás, S. Kirsch, A. Carl, M. Acet, and E. F. Wassermann, “Reflection properties of nanostructure-arrayed silicon surfaces,” Nanotechnology11(3), 161–164 (2000). [CrossRef]
Th. Stelzner, M. Pietsch, G. Andrä, F. Falk, E. Ose, and S. Christiansen, “Silicon nanowire-based solar cells,” Nanotechnology19(29), 295203 (2008). [CrossRef] [PubMed]

Nature

B. Tian, X. Zheng, T. J. Kempa, Y. Fang, N. Yu, G. Yu, J. Huang, and C. M. Lieber, “Coaxial silicon nanowires as solar cells and nanoelectronic power sources,” Nature449(7164), 885–889 (2007). [CrossRef] [PubMed]

Opt. Express

Y.-C. Yao, M.-T. Tsai, H.-C. Hsu, L.-W. She, C.-M. Cheng, Y.-C. Chen, C.-J. Wu, and Y.-J. Lee, “Use of two-dimensional nanorod arrays with slanted ITO film to enhance optical absorption for photovoltaic applications,” Opt. Express20(4), 3479–3489 (2012). [CrossRef] [PubMed]

Prog. Photovolt. Res. Appl.

O. Gunawan, K. Wang, B. Fallahazad, Y. Zhang, E. Tutuc, and S. Guha, “High performance wire-array silicon solar cells,” Prog. Photovolt. Res. Appl.19(3), 307–312 (2011). [CrossRef]
M. A. Green, “The path to 25% silicon solar cell efficiency: history of silicon cell evolution,” Prog. Photovolt. Res. Appl.17(3), 183–189 (2009). [CrossRef]

Science

S. W. Boettcher, J. M. Spurgeon, M. C. Putnam, E. L. Warren, D. B. Turner-Evans, M. D. Kelzenberg, J. R. Maiolo, H. A. Atwater, and N. S. Lewis, “Energy-conversion properties of vapor-liquid-solid-grown silicon wire-array photocathodes,” Science327(5962), 185–187 (2010). [CrossRef] [PubMed]

Small

K. Peng, Y. Xu, Y. Wu, Y. Yan, S. T. Lee, and J. Zhu, “Aligned single-crystalline Si nanowire arrays for photovoltaic applications,” Small1(11), 1062–1067 (2005). [CrossRef] [PubMed]

Sol. Energy

D. H. Macdonald, A. Cuevas, M. J. Kerr, C. Samundsett, D. Ruby, S. Winderbaum, and A. Leo, “Texturing industrial multicrystalline silicon solar cells,” Sol. Energy76(1-3), 277–283 (2004). [CrossRef]

Sol. Energy Mater. Sol. Cells

V. V. Iyengar, B. K. Nayak, and M. C. Gupta, “Optical properties of silicon light trapping structures for photovoltaics,” Sol. Energy Mater. Sol. Cells94(12), 2251–2257 (2010). [CrossRef]
S. Perraud, S. Poncet, S. Noël, M. Levis, P. Faucherand, E. Rouvière, P. Thony, C. Jaussaud, and R. Delsol, “Full process for integrating silicon nanowire arrays into solar cells,” Sol. Energy Mater. Sol. Cells93(9), 1568–1571 (2009). [CrossRef]

Other

A. Fujisaka, S. Kang, L. Tian, Y. L. Chow, and A. Belyaev, “Implant-cleave process enables ultra-thin wafers without kerf loss,” Photovoltaics World, pp. 21–24, Issue: May/Jun (2011).
M. Born and E. Wolf, Principles of optics 7th edition. Cambridge University Press, Cambridge, U.K., 46 (1999).
I. Tobı’as, C. del Can˜izo, J. Alonso, Handbook of Photovoltaic Science and Engineering (Wiley, New York, 2004).
M. A. Green, Solar Cells: Operating Principles, Technology and System Applications (Prentice-Hall, Englewood Cliffs, New Jersey, 1982).

2012, Rasool, Appl. Phys. Lett.
2012, Yao, Opt. Express
2011, Wolden, J. Vac. Sci. Technol. A
2011, Gunawan, Prog. Photovolt. Res. Appl.
2010, Zhu, Nano Lett.
2010, Iyengar, Sol. Energy Mater. Sol. Cells
2010, Boettcher, Science
2010, Xiao, Appl. Surf. Sci.
2010, Wong, IEEE Electron Device Lett.
2009, Green, Prog. Photovolt. Res. Appl.
2009, Hochbaum, Nano Lett.
2009, Lee, Appl. Phys. Lett.
2009, Perraud, Sol. Energy Mater. Sol. Cells
2009, Li, Appl. Phys. Lett.
2008, Kislyuk, J. Nanosci. Nanotechnol.
2008, Stelzner, Nanotechnology
2008, Garnett, J. Am. Chem. Soc.
2008, Tsakalakos, Mater. Sci. Eng.
2008, Peng, Appl. Phys. Lett.
2007, Tsakalakos, Appl. Phys. Lett.
2007, Tian, Nature
2005, Peng, Small
2005, Kayes, J. Appl. Phys.
2004, Macdonald, Sol. Energy
2000, Li, Appl. Phys. Lett.
2000, Hadobás, Nanotechnology
1998, Robbie, J. Vac. Sci. Technol. B
1969, Mendelson, J. Am. Ceram. Soc.

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[1] L. Tsakalakos, “Nanostructures for photovoltaics,” Mater. Sci. Eng.62(6), 175–189 (2008). [CrossRef]

[2] C. A. Wolden, J. Kurtin, J. B. Baxter, I. Repins, S. E. Shaheen, J. T. Torvik, A. A. Rockett, V. M. Fthenakis, and E. S. Aydil, “Photovoltaic manufacturing: Present status, future prospects, and research needs,” J. Vac. Sci. Technol. A29(3), 030801 (2011). [CrossRef]

[3] A. Fujisaka, S. Kang, L. Tian, Y. L. Chow, and A. Belyaev, “Implant-cleave process enables ultra-thin wafers without kerf loss,” Photovoltaics World, pp. 21–24, Issue: May/Jun (2011).

[4] J. Zhu, C.-M. Hsu, Z. Yu, S. Fan, and Y. Cui, “Nanodome solar cells with efficient light management and self-cleaning,” Nano Lett.10(6), 1979–1984 (2010). [CrossRef] [PubMed]

[5] O. Gunawan, K. Wang, B. Fallahazad, Y. Zhang, E. Tutuc, and S. Guha, “High performance wire-array silicon solar cells,” Prog. Photovolt. Res. Appl.19(3), 307–312 (2011). [CrossRef]

[6] K. Hadobás, S. Kirsch, A. Carl, M. Acet, and E. F. Wassermann, “Reflection properties of nanostructure-arrayed silicon surfaces,” Nanotechnology11(3), 161–164 (2000). [CrossRef]

[7] K. Peng, Y. Xu, Y. Wu, Y. Yan, S. T. Lee, and J. Zhu, “Aligned single-crystalline Si nanowire arrays for photovoltaic applications,” Small1(11), 1062–1067 (2005). [CrossRef] [PubMed]

[8] V. V. Iyengar, B. K. Nayak, and M. C. Gupta, “Optical properties of silicon light trapping structures for photovoltaics,” Sol. Energy Mater. Sol. Cells94(12), 2251–2257 (2010). [CrossRef]

[9] J. Li, H. Yu, S. M. Wong, G. Zhang, X. Sun, P. G.-Q. Lo, and D.-L. Kwong, “S nanopillar array optimization on Si thin films for solar energy harvesting,” Appl. Phys. Lett.95(3), 033102 (2009). [CrossRef]

[10] V. V. Kislyuk and O. P. Dimitriev, “Nanorods and nanotubes for solar cells,” J. Nanosci. Nanotechnol.8(1), 131–148 (2008). [CrossRef] [PubMed]

[11] B. Tian, X. Zheng, T. J. Kempa, Y. Fang, N. Yu, G. Yu, J. Huang, and C. M. Lieber, “Coaxial silicon nanowires as solar cells and nanoelectronic power sources,” Nature449(7164), 885–889 (2007). [CrossRef] [PubMed]

[12] S. W. Boettcher, J. M. Spurgeon, M. C. Putnam, E. L. Warren, D. B. Turner-Evans, M. D. Kelzenberg, J. R. Maiolo, H. A. Atwater, and N. S. Lewis, “Energy-conversion properties of vapor-liquid-solid-grown silicon wire-array photocathodes,” Science327(5962), 185–187 (2010). [CrossRef] [PubMed]

[13] B. M. Kayes, H. A. Atwater, and N. S. Lewis, “Comparison of the device physics principles of planar and radial p-n junction nanorod solar cells,” J. Appl. Phys.97(11), 114302 (2005). [CrossRef]

[14] L. Tsakalakos, J. Balch, J. Fronheiser, B. A. Korevaar, O. Sulima, and J. Rand, “Silicon nanowire solar cells,” Appl. Phys. Lett.91(23), 233117 (2007). [CrossRef]

[15] E. C. Garnett and P. Yang, “Silicon nanowire radial p-n junction solar cells,” J. Am. Chem. Soc.130(29), 9224–9225 (2008). [CrossRef] [PubMed]

[16] S. Perraud, S. Poncet, S. Noël, M. Levis, P. Faucherand, E. Rouvière, P. Thony, C. Jaussaud, and R. Delsol, “Full process for integrating silicon nanowire arrays into solar cells,” Sol. Energy Mater. Sol. Cells93(9), 1568–1571 (2009). [CrossRef]

[17] Th. Stelzner, M. Pietsch, G. Andrä, F. Falk, E. Ose, and S. Christiansen, “Silicon nanowire-based solar cells,” Nanotechnology19(29), 295203 (2008). [CrossRef] [PubMed]

[18] M. A. Green, “The path to 25% silicon solar cell efficiency: history of silicon cell evolution,” Prog. Photovolt. Res. Appl.17(3), 183–189 (2009). [CrossRef]

[19] S. M. Wong, H. Y. Yu, J. S. Li, G. Zhang, G. Q. Lo, and D. L. Kwong, “Design high-efficiency Si nanopillar-array-textured thin-film solar cell,” IEEE Electron Device Lett.31(4), 335–337 (2010). [CrossRef]

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Direct electrical contact of slanted ITO film on axial p-n junction silicon nanowire solar cells