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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 1 — Jan. 13, 2014
  • pp: 661–666

Thermal stress implications in athermal TiO2 waveguides on a silicon substrate

Jock Bovington, Rui Wu, Kwang-Ting Cheng, and John E. Bowers  »View Author Affiliations


Optics Express, Vol. 22, Issue 1, pp. 661-666 (2014)
http://dx.doi.org/10.1364/OE.22.000661


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Abstract

Ring resonators with TiO2 core confinement factors from 0.07 to 0.42 are fabricated and measured for thermal sensitivity achieving −2.9 pm/K thermal drift in the best case. Materials used are CMOS compatible (TiO2, SiO2 and Si3N4) on a Si substrate. The under discussed role of stress in thermo-optic behavior is clearly observed when contrasting waveguides buried in SiO2 to those with etched sidewalls revealed to air. Multiphysics simulations are conducted to provide a theoretical explanation of this phenomenon in contrast to the more widely reported theories on thermo-optic behavior dominated by confinement factor.

© 2014 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(160.3130) Materials : Integrated optics materials
(160.6840) Materials : Thermo-optical materials
(230.7380) Optical devices : Waveguides, channeled

ToC Category:
Integrated Optics

History
Original Manuscript: September 30, 2013
Revised Manuscript: November 23, 2013
Manuscript Accepted: December 6, 2013
Published: January 6, 2014

Citation
Jock Bovington, Rui Wu, Kwang-Ting Cheng, and John E. Bowers, "Thermal stress implications in athermal TiO2 waveguides on a silicon substrate," Opt. Express 22, 661-666 (2014)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-22-1-661


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