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Surface plasmon-enhanced nanoporous GaN-based green light-emitting diodes with Al2O3 passivation layer

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Abstract

A surface plasmon (SP)-enhanced nanoporous GaN-based green LED based on top-down processing technology has been successfully fabricated. This SP-enhanced LED consists of nanopores passing through the multiple quantum wells (MQWs) region, with Ag nanorod array filled in the nanopores for SP-MQWs coupling and thin Al2O3 passivation layer for electrical protection. Compared with nanoporous LED without Ag nanorods, the electroluminescence (EL) peak intensity for the SP-enhanced LED was greatly enhanced by 380% and 220% at an injection current density of 1 and 20A/cm2, respectively. Our results show that the increased EL intensity is mainly attributed to the improved internal quantum efficiency of LED due to the SP coupling between Ag nanorods and MQWs.

© 2014 Optical Society of America

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Figures (4)

Fig. 1
Fig. 1 (a) Schematic diagram of the nanoporous GaN-based green LED with lateral surface plasmon coupling methodology and (b) The SP field distribution of Ag nanorods simulated by FDTD.
Fig. 2
Fig. 2 (a) Top view SEM image of nanoporous LED before Ag deposition. (b) Cross section of nanoporous LED with Ag nanorods. (c) SEM image of the Ag nanorods array separated from nanoporous LED. (d) Extinction spectrum of Ag nanorods filled in nanopores. (e) J-V characteristics of nanoporous LED with and without Ag nanorods.
Fig. 3
Fig. 3 EL spectrum (a), Optical image (b), Time-resolved photoluminescence (c) and EL enhancement factors of nanoporous LED with and without Ag nanorods at 1A/cm2 (d).
Fig. 4
Fig. 4 EL spectra (a, b), EL enhancement factor (c) and EL integrated intensity (d) of nanoporous LED with and without Ag nanorods measured at different current density.
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