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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 11 — Jun. 2, 2014
  • pp: 13102–13108

Focused ion beam post-processing of optical fiber Fabry-Perot cavities for sensing applications

Ricardo M. André, Simon Pevec, Martin Becker, Jan Dellith, Manfred Rothhardt, Manuel B. Marques, Denis Donlagic, Hartmut Bartelt, and Orlando Frazão  »View Author Affiliations

Optics Express, Vol. 22, Issue 11, pp. 13102-13108 (2014)

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Focused ion beam technology is combined with chemical etching of specifically designed fibers to create Fabry-Perot interferometers. Hydrofluoric acid is used to etch special fibers and create microwires with diameters of 15 μm. These microwires are then milled with a focused ion beam to create two different structures: an indented Fabry-Perot structure and a cantilever Fabry-Perot structure that are characterized in terms of temperature. The cantilever structure is also sensitive to vibrations and is capable of measuring frequencies in the range 1 Hz – 40 kHz.

© 2014 Optical Society of America

OCIS Codes
(050.2230) Diffraction and gratings : Fabry-Perot
(060.2310) Fiber optics and optical communications : Fiber optics
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(160.2290) Materials : Fiber materials
(230.4000) Optical devices : Microstructure fabrication

ToC Category:

Original Manuscript: March 18, 2014
Revised Manuscript: May 15, 2014
Manuscript Accepted: May 17, 2014
Published: May 22, 2014

Ricardo M. André, Simon Pevec, Martin Becker, Jan Dellith, Manfred Rothhardt, Manuel B. Marques, Denis Donlagic, Hartmut Bartelt, and Orlando Frazão, "Focused ion beam post-processing of optical fiber Fabry-Perot cavities for sensing applications," Opt. Express 22, 13102-13108 (2014)

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