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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 11 — Jun. 2, 2014
  • pp: 13250–13262

Coherent Fourier scatterometry for detection of nanometer-sized particles on a planar substrate surface

S. Roy, A. C. Assafrão, S. F. Pereira, and H. P. Urbach  »View Author Affiliations


Optics Express, Vol. 22, Issue 11, pp. 13250-13262 (2014)
http://dx.doi.org/10.1364/OE.22.013250


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Abstract

Inspection tools for nano-particle contamination on a planar substrate surface is a critical problem in micro-electronics. The present solutions are either expensive and slow or inexpensive and fast but have low sensitivity because of limitations due to diffraction. Most of them are also substrate specific. In this article we report how Coherent Fourier Scatterometry is used for detection of particles smaller than λ/4. Merits of the technique, especially, the procedures to improve SNR, its flexibility and its robustness on rough surfaces are discussed with simulated and experimental results.

© 2014 Optical Society of America

OCIS Codes
(070.0070) Fourier optics and signal processing : Fourier optics and signal processing
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(170.5810) Medical optics and biotechnology : Scanning microscopy

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: March 3, 2014
Revised Manuscript: April 19, 2014
Manuscript Accepted: April 24, 2014
Published: May 27, 2014

Virtual Issues
Vol. 9, Iss. 8 Virtual Journal for Biomedical Optics

Citation
S. Roy, A. C. Assafrão, S. F. Pereira, and H. P. Urbach, "Coherent Fourier scatterometry for detection of nanometer-sized particles on a planar substrate surface," Opt. Express 22, 13250-13262 (2014)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-22-11-13250


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