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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 12 — Jun. 16, 2014
  • pp: 14792–14802

Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining

Jiangxin Song, Jintian Lin, Jialei Tang, Yang Liao, Fei He, Zhaohui Wang, Lingling Qiao, Koji Sugioka, and Ya Cheng  »View Author Affiliations


Optics Express, Vol. 22, Issue 12, pp. 14792-14802 (2014)
http://dx.doi.org/10.1364/OE.22.014792


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Abstract

We report on fabrication of a microtoroid resonator of a high-quality factor (i.e., Q-factor of ~3.24 × 106 measured under the critical coupling condition) integrated in a microfluidic channel using femtosecond laser three-dimensional (3D) micromachining. Coupling of light into and out of the microresonator has been realized with a fiber taper that is reliably assembled with the microtoroid. The assembly of the fiber to the microtoroid is achieved by welding the fiber taper onto the sidewall of the microtoroid using CO2 laser irradiation. The integrated microresonator maintains a high Q-factor of 3.21 × 105 as measured in air, which should still be sufficient for many sensing applications. We test the functionality of the integrated optofluidic sensor by performing bulk refractive index sensing of purified water doped with tiny amount of salt. It is shown that a detection limit of ~1.2 × 10−4 refractive index unit can be achieved. Our result showcases the capability of integration of high-Q microresonators with complex microfluidic systems using femtosecond laser 3D micromachining.

© 2014 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(140.7090) Lasers and laser optics : Ultrafast lasers
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Laser Microfabrication

History
Original Manuscript: April 22, 2014
Manuscript Accepted: June 3, 2014
Published: June 9, 2014

Virtual Issues
Vol. 9, Iss. 8 Virtual Journal for Biomedical Optics

Citation
Jiangxin Song, Jintian Lin, Jialei Tang, Yang Liao, Fei He, Zhaohui Wang, Lingling Qiao, Koji Sugioka, and Ya Cheng, "Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining," Opt. Express 22, 14792-14802 (2014)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-22-12-14792


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