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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 12 — Jun. 16, 2014
  • pp: 14859–14870

High-throughput ptychography using Eiger: scanning X-ray nano-imaging of extended regions

Manuel Guizar-Sicairos, Ian Johnson, Ana Diaz, Mirko Holler, Petri Karvinen, Hans-Christian Stadler, Roberto Dinapoli, Oliver Bunk, and Andreas Menzel  »View Author Affiliations


Optics Express, Vol. 22, Issue 12, pp. 14859-14870 (2014)
http://dx.doi.org/10.1364/OE.22.014859


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Abstract

The smaller pixel size and high frame rate of next-generation photon counting pixel detectors opens new opportunities for the application of X-ray coherent diffractive imaging (CDI). In this manuscript we demonstrate fast image acquisition for ptychography using an Eiger detector. We achieve above 25,000 resolution elements per second, or an effective dwell time of 40 μs per resolution element, when imaging a 500 μm × 290 μm region of an integrated electronic circuit with 41 nm resolution. We further present the application of a scheme of sharing information between image parts that allows the field of view to exceed the range of the piezoelectric scanning system and requirements on the stability of the illumination to be relaxed.

© 2014 Optical Society of America

OCIS Codes
(040.7480) Detectors : X-rays, soft x-rays, extreme ultraviolet (EUV)
(100.3010) Image processing : Image reconstruction techniques
(100.5070) Image processing : Phase retrieval
(180.7460) Microscopy : X-ray microscopy

ToC Category:
X-ray Optics

History
Original Manuscript: March 27, 2014
Revised Manuscript: May 10, 2014
Manuscript Accepted: May 11, 2014
Published: June 10, 2014

Virtual Issues
Vol. 9, Iss. 8 Virtual Journal for Biomedical Optics

Citation
Manuel Guizar-Sicairos, Ian Johnson, Ana Diaz, Mirko Holler, Petri Karvinen, Hans-Christian Stadler, Roberto Dinapoli, Oliver Bunk, and Andreas Menzel, "High-throughput ptychography using Eiger: scanning X-ray nano-imaging of extended regions," Opt. Express 22, 14859-14870 (2014)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-22-12-14859


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References

  1. J. Miao, P. Charalambous, J. Kirz, and D. Sayre, “Extending the methodology of X-ray crystallography to allow imaging of micrometre-sized non-crystalline specimens,” Nature 400, 342–344 (1999). [CrossRef]
  2. R. W. Gerchberg, “A practical algorithm for the determination of phase from image and diffraction plane pictures,” Optik 35, 237 (1972).
  3. J. R. Fienup, “Phase retrieval algorithms: a comparison,” Appl. Opt. 21, 2758–2769 (1982). [CrossRef] [PubMed]
  4. B. Abbey, K. Nugent, G. Williams, J. Clark, A. Peele, M. Pfeifer, M. de Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys. 4, 394–398 (2008). [CrossRef]
  5. H. M. L. Faulkner and J. M. Rodenburg, “Movable aperture lensless transmission microscopy: A novel phase retrieval algorithm,” Phys. Rev. Lett. 93, 023903 (2004). [CrossRef] [PubMed]
  6. M. Guizar-Sicairos and J. R. Fienup, “Phase retrieval with transverse translation diversity: a nonlinear optimization approach,” Opt. Express 16, 7264–7278 (2008). [CrossRef] [PubMed]
  7. P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning X-ray diffraction microscopy,” Science 321, 379–382 (2008). [CrossRef] [PubMed]
  8. P. Thibault, M. Dierolf, O. Bunk, A. Menzel, and F. Pfeiffer, “Probe retrieval in ptychographic coherent diffractive imaging,” Ultramicroscopy 109, 338–343 (2009). [CrossRef] [PubMed]
  9. M. Guizar-Sicairos and J. R. Fienup, “Measurement of coherent x-ray focused beams by phase retrieval with transverse translation diversity,” Opt. Express 17, 2670–2685 (2009). [CrossRef] [PubMed]
  10. C. M. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. M. Khounsary, J. Vila-Comamala, O. Bunk, J. R. Fienup, A. T. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard x-ray beam and alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express 18, 23420–23427 (2010). [CrossRef] [PubMed]
  11. A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96, 091102 (2010). [CrossRef]
  12. J. Vila-Comamala, A. Diaz, M. Guizar-Sicairos, A. Mantion, C. M. Kewish, A. Menzel, O. Bunk, and C. David, “Characterization of high-resolution diffractive x-ray optics by ptychographic coherent diffractive imaging,” Opt. Express 19, 21333–21344 (2011). [CrossRef] [PubMed]
  13. A. Schropp, R. Hoppe, J. Patommel, D. Samberg, F. Seiboth, S. Stephan, G. Wellenreuther, G. Falkenberg, and C. Schroer, “Hard x-ray scanning microscopy with coherent radiation: Beyond the resolution of conventional x-ray microscopes,” Appl. Phys. Lett. 100, 253112 (2012). [CrossRef]
  14. Y. Takahashi, A. Suzuki, N. Zettsu, Y. Kohmura, Y. Senba, H. Ohashi, K. Yamauchi, and T. Ishikawa, “Towards high-resolution ptychographic x-ray diffraction microscopy,” Phys. Rev. B 83, 214109 (2011). [CrossRef]
  15. Y. Takahashi, A. Suzuki, S. Furutaku, K. Yamauchi, Y. Kohmura, and T. Ishikawa, “High-resolution and high-sensitivity phase-contrast imaging by focused hard X-ray ptychography with a spatial filter,” Appl. Phys. Lett. 102, 094102 (2013). [CrossRef]
  16. R. N. Wilke, M. Vassholz, and T. Salditt, “Semi-transparent central stop in high-resolution X-ray ptychography using Kirkpatrick–Baez focusing,” Acta Cryst. A 69, 490–497 (2013). [CrossRef]
  17. A. M. Maiden, M. J. Humphry, F. Zhang, and J. M. Rodenburg, “Superresolution imaging via ptychography,” J. Opt. Soc. Am. A 28, 604–612 (2011). [CrossRef]
  18. P. Thibault and A. Menzel, “Reconstructing state mixtures from diffraction measurements,” Nature 494, 68–71 (2013). [CrossRef] [PubMed]
  19. A. Maiden, G. Morrison, B. Kaulich, A. Gianoncelli, and J. Rodenburg, “Soft X-ray spectromicroscopy using ptychography with randomly phased illumination,” Nat. Commun. 4, 1669 (2013). [CrossRef] [PubMed]
  20. A. M. Maiden, M. J. Humphry, and J. M. Rodenburg, “Ptychographic transmission microscopy in three dimensions using a multi-slice approach,” J. Opt. Soc. Am. A 29, 1606–1614 (2012). [CrossRef]
  21. M. Dierolf, A. Menzel, P. Thibault, P. Schneider, C. M. Kewish, R. Wepf, O. Bunk, and F. Pfeiffer, “Ptychographic X-ray computed tomography at the nanoscale,” Nature 467, 436–439 (2010). [CrossRef] [PubMed]
  22. A. Diaz, P. Trtik, M. Guizar-Sicairos, A. Menzel, P. Thibault, and O. Bunk, “Quantitative X-ray phase nanotomography,” Phys. Rev. B 85, 020104(R) (2012). [CrossRef]
  23. M. Holler, J. Raabe, A. Diaz, M. Guizar-Sicairos, C. Quitmann, A. Menzel, and O. Bunk, “An instrument for 3D X-ray nano-imaging,” Rev. Sci. Instrum. 83, 073703 (2012). [CrossRef] [PubMed]
  24. M. Holler, A. Diaz, M. Guizar-Sicairos, P. Karvinen, E. Färm, E. Härkönen, M. Ritala, A. Menzel, J. Raabe, and O. Bunk, “Hard x-ray ptychographic computed tomography at 16 nm 3D resolution,” Sci. Rep. 4, 3857 (2014). [CrossRef]
  25. M. Guizar-Sicairos, A. Diaz, M. Holler, M. S. Lucas, A. Menzel, R. A. Wepf, and O. Bunk, “Phase tomography from X-ray coherent diffractive imaging projections,” Opt. Express 19, 21345–21357 (2011). [CrossRef] [PubMed]
  26. R. N. Wilke, M. Priebe, M. Bartels, K. Giewekemeyer, A. Diaz, P. Karvinen, and T. Salditt, “Hard x-ray imaging of bacterial cells: nano-diffraction and ptychographic reconstruction,” Opt. Express 20, 19232–19254 (2012). [CrossRef] [PubMed]
  27. M. W. M. Jones, G. A. van Riessen, B. Abbey, C. T. Putkunz, M. D. Junker, E. Balaur, D. J. Vine, I. McNulty, B. Chen, B. D. Arhatari, S. Frankland, K. A. Nugent, L. Tilley, and A. G. Peele, “Whole-cell phase contrast imaging at the nanoscale using Fresnel coherent diffractive imaging tomography,” Sci. Rep. 3, 2288 (2013). [CrossRef] [PubMed]
  28. P. Trtik, A. Diaz, M. Guizar-Sicairos, A. Menzel, and O. Bunk, “Density mapping of hardened cement paste using ptychographic X-ray computed tomography,” Cem. Concr. Compos. 36, 71–77 (2013). [CrossRef]
  29. B. Chen, M. Guizar-Sicairos, G. Xiong, L. Shemilt, A. Diaz, J. Nutter, N. Burdet, S. Huo, J. Mancuso, A. Monteith, F. Vergeer, A. Burgess, and I. Robinson, “Three-dimensional structure analysis and percolation properties of a barrier marine coating,” Sci. Rep. 3, 1177 (2013). [CrossRef] [PubMed]
  30. A. Diaz, M. Guizar-Sicairos, A. Poeppel, A. Menzel, and O. Bunk, “Characterization of carbon fibers using X-ray phase nanotomography,” Carbon 67, 98–103 (2014). [CrossRef]
  31. M. Esmaeili, J. B. Fløystad, A. Diaz, K. Høydalsvik, M. Guizar-Sicairos, J. W. Andreasen, and D. W. Breiby, “Ptychographic X-ray tomography of silk fiber hydration,” Macromolecules 46, 434–439 (2013). [CrossRef]
  32. R. Dinapoli, A. Bergamaschi, B. Henrich, R. Horisberger, I. Johnson, A. Mozzanica, E. Schmid, B. Schmitt, A. Schreiber, X. Shi, and G. Theidel, “Eiger: Next generation single photon counting detector for x-ray applications,” Nucl. Instr. Meth. Phys. Res. A 650, 79–83 (2011). [CrossRef]
  33. I. Johnson, A. Bergamaschi, J. Buitenhuis, R. Dinapoli, D. Greiffenberg, B. Henrich, T. Ikonen, G. Meier, A. Menzel, A. Mozzanica, V. Radicci, D. K. Satapathy, B. Schmitt, and X. Shi, “Capturing dynamics with Eiger, a fast-framing X-ray detector,” J. Synchrotron Radiat. 19, 1001–1005 (2012). [CrossRef] [PubMed]
  34. M. Dierolf, I. Zanette, B. Enders, P. Thibault, A. Menzel, O. Bunk, and F. Pfeiffer, “Ptychographic reconstructions using shared data sets,” (presented in Coherence 2012, International Workshop on Phase retrieval and Coherent Scattering, Fukuoka, Japan, 18–21 June2012).
  35. M. Dierolf, A. Menzel, O. Bunk, F. Pfeiffer, and P. Thibault, “Ptychographic reconstructions using shared data sets,” In preparation (2014).
  36. B. Henrich, A. Bergamaschi, C. Broennimann, R. Dinapoli, E. F. Eikenberry, I. Johnson, M. Kobas, P. Kraft, A. Mozzanica, and B. Schmitt, “Pilatus: A single photon counting pixel detector for x-ray applications,” Nucl. Instrum. Methods Phys. Res. A 607, 247–249 (2009). [CrossRef]
  37. C. Ponchut, J. M. Rigal, J. Clément, E. Papillon, A. Homs, and S. Petitdemange, “MAXIPIX, a fast readout photon-counting x-ray area detector for synchrotron applications,” J. Instrum. 6, C01069 (2011). [CrossRef]
  38. R. A. Dilanian, G. J. Williams, L. W. Whitehead, D. J. Vine, A. G. Peele, E. Balaur, I. McNulty, H. M. Quiney, and K. A. Nugent, “Coherent diffractive imaging: a new statistically regularized amplitude constraint,” New J. Phys. 12, 093042 (2010). [CrossRef]
  39. P. Thibault and M. Guizar-Sicairos, “Maximum-likelihood refinement for coherent diffractive imaging,” New J. Phys. 14, 063004 (2012). [CrossRef]
  40. P. Kraft, A. Bergamaschi, C. Broennimann, R. Dinapoli, E. F. Eikenberry, B. Henrich, I. Johnson, A. Mozzanica, C. M. Schlepütz, P. R. Willmott, and B. Schmitt, “Performance of single-photon-counting PILATUS detector modules,” J. Synchrotron Radiat. 16, 368–375 (2009). [CrossRef] [PubMed]
  41. T. B. Edo, D. J. Batey, A. M. Maiden, C. Rau, U. Wagner, Z. D. Pešić, T. A. Waigh, and J. M. Rodenburg, “Sampling in x-ray ptychography,” Phys. Rev. A 87, 053850 (2013). [CrossRef]
  42. X. Llopart, M. Campbell, R. Dinapoli, D. San Segundo, and E. Pernigotti, “Medipix2: A 64-k pixel readout chip with 55 μm square elements working in single photon counting mode,” Nuclear Science, IEEE Transactions on 49, 2279–2283 (2002). [CrossRef]
  43. R. Ballabriga, M. Campbell, E. Heijne, X. Llopart, L. Tlustos, and W. Wong, “Medipix3: A 64 k pixel detector readout chip working in single photon counting mode with improved spectrometric performance,” Nucl. Instrum. Methods Phys. Res. A 633(Supp. 1), S15–S18 (2011). 11th International Workshop on Radiation Imaging Detectors (IWORID). [CrossRef]
  44. J. Marchal, I. Horswell, B. Willis, R. Plackett, E. N. Gimenez, J. Spiers, D. Ballard, P. Booker, J. A. Thompson, P. Gibbons, S. R. Burge, T. Nicholls, J. Lipp, and N. Tartoni, “EXCALIBUR: a small-pixel photon counting area detector for coherent X-ray diffraction - Front-end design, fabrication and characterisation,” J. Phys.: Conf. Ser. 425, 062003 (2013).
  45. A. Schropp, P. Boye, A. Goldschmidt, S. Hönig, R. Hoppe, J. Patommel, C. Rakete, D. Samberg, S. Stephan, S. Schöder, M. Burghammer, and C. G. Schroer, “Non-destructive and quantitative imaging of a nano-structured microchip by ptychographic hard X-ray scanning microscopy,” J. Microsc. 241, 9–12 (2011). [CrossRef]
  46. P. Godard, A. M. Carbone, G. F. Mastropietro, G. Chen, L. Capello, A. Diaz, T. H. Metzger, and J. Stangl, “Three-dimensional high-resolution quantitative microscopy of extended crystals,” Nat. Commun. 2, 568 (2011). [CrossRef] [PubMed]
  47. D. J. Vine, D. Pelliccia, C. Holzner, S. B. Baines, A. Berry, I. McNulty, S. Vogt, A. G. Peele, and K. A. Nugent, “Simultaneous x-ray fluorescence and ptychographic microscopy of cyclotella meneghiniana,” Opt. Express 20, 18287–18296 (2012). [CrossRef] [PubMed]
  48. I. Johnson, A. Bergamaschi, H. Billich, S. Cartier, R. Dinapoli, D. Greiffenberg, M. Guizar-Sicairos, B. Henrich, A. Mozzanica, B. Schmitt, X. Shi, and G. Tinti, “Eiger: A single photon counting X-ray detector,” J. Instrum., in press (2014).
  49. B. Abbey, G. J. Williams, M. A. Pfeifer, J. N. Clark, C. T. Putkunz, A. Torrance, I. McNulty, T. M. Levin, A. G. Peele, and K. A. Nugent, “Quantitative coherent diffractive imaging of an integrated circuit at a spatial resolution of 20 nm,” Appl. Phys. Lett. 93, 214101 (2008). [CrossRef]
  50. An application programming interface (API) specification for parallel programming. http://openmp.org/
  51. M. Guizar-Sicairos, S. T. Thurman, and J. R. Fienup, “Efficient subpixel image registration algorithms,” Opt. Lett. 33, 156–158 (2008). [CrossRef] [PubMed]
  52. E. Lima, A. Diaz, M. Guizar-Sicairos, S. Gorelick, P. Pernot, T. Schleier, and A. Menzel, “Cryo-scanning X-ray diffraction microscopy of frozen-hydrated yeast,” J. Microsc. 249, 1–7 (2013). [CrossRef]
  53. M. van Heel and M. Schatz, “Fourier shell correlation threshold criteria,” J. Struct. Biol. 151, 250–262 (2005). [CrossRef] [PubMed]
  54. J. Thieme, J. Sedlmair, S.-C. Gleber, J. Prietzel, J. Coates, K. Eusterhues, G. Abbt-Braun, and M. Salome, “X-ray spectromicroscopy in soil and environmental sciences,” J. Synchrotron Radiat. 17, 149–157 (2010). [CrossRef] [PubMed]
  55. K. Medjoubi, N. Leclercq, F. Langlois, A. Buteau, S. Lé, S. Poirier, P. Mercère, M. C. Sforna, C. M. Kewish, and A. Somogyi, “Development of fast, simultaneous and multi-technique scanning hard X-ray microscopy at Synchrotron Soleil,” J. Synchrotron Radiat. 20, 293–299 (2013). [CrossRef] [PubMed]
  56. S. T. Kelly, P. Nigge, S. Prakash, A. Laskin, B. Wang, T. Tyliszczak, S. R. Leone, and M. K. Gilles, “An environmental sample chamber for reliable scanning transmission x-ray microscopy measurements under water vapor,” Rev. Sci. Instrum. 84, 073708 (2013). [CrossRef] [PubMed]
  57. M. Dierolf, P. Thibault, A. Menzel, C. M. Kewish, K. Jefimovs, I. Schlichting, K. von Knig, O. Bunk, and F. Pfeiffer, “Ptychographic coherent diffractive imaging of weakly scattering specimens,” New J. Phys. 12, 035017 (2010). [CrossRef]
  58. P. Braun, “On-the-fly scans for x-ray ptychography,” Master’s thesis, Université Montpellier2 (2013).
  59. A. M. Maiden and J. M. Rodenburg, “An improved ptychographical phase retrieval algorithm for diffractive imaging,” Ultramicroscopy 109, 1256–1262 (2009). [CrossRef] [PubMed]

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