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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 12 — Jun. 16, 2014
  • pp: 14958–14963

Motion-free all optical inspection system for nanoscale topology control

Maxim Ryabko, Sergey Koptyaev, Alexander Shcherbakov, Alexey Lantsov, and S. Y. Oh  »View Author Affiliations


Optics Express, Vol. 22, Issue 12, pp. 14958-14963 (2014)
http://dx.doi.org/10.1364/OE.22.014958


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Abstract

We present a novel all optical method for nanoscale pattern inspection. This method uses the chromatic aberration in an imaging optical system and a tunable light source. Such an approach allows stable and precise inspection of nanoscale objects based on an analysis of their defocused diffraction patterns without any external mechanical influence on the sample or optical system. We demonstrate the efficiency of a low cost light source tunable in the range of a light emitting diode bandwidth of ~30 nm (FWHM) for providing the required defocusing. The proposed method is tested using calibrated lines (height 50 nm, length 100 μm, critical dimension (СD) value range 40-150 nm with 10 nm steps) on a monocrystalline silicon substrate with demonstrated measurement accuracy better than 10 nm. A comparison of this all optical method with a mechanical scanning inspection system is discussed.

© 2014 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(180.0180) Microscopy : Microscopy
(260.0260) Physical optics : Physical optics
(050.6624) Diffraction and gratings : Subwavelength structures

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: March 21, 2014
Revised Manuscript: May 16, 2014
Manuscript Accepted: May 19, 2014
Published: June 11, 2014

Virtual Issues
Vol. 9, Iss. 8 Virtual Journal for Biomedical Optics

Citation
Maxim Ryabko, Sergey Koptyaev, Alexander Shcherbakov, Alexey Lantsov, and S. Y. Oh, "Motion-free all optical inspection system for nanoscale topology control," Opt. Express 22, 14958-14963 (2014)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-22-12-14958


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