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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 14 — Jul. 14, 2014
  • pp: 16767–16777

High-efficiency and wideband interlayer grating couplers in multilayer Si/SiO2/SiN platform for 3D integration of optical functionalities

Majid Sodagar, Reza Pourabolghasem, Ali A. Eftekhar, and Ali Adibi  »View Author Affiliations


Optics Express, Vol. 22, Issue 14, pp. 16767-16777 (2014)
http://dx.doi.org/10.1364/OE.22.016767


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Abstract

We have designed interlayer grating couplers with single/double metallic reflectors for Si/SiO2/SiN multilayer material platform. Out-of-plane diffractive grating couplers separated by 1.6 μm thick buffer SiO2 layer are vertically stacked against each other in Si and SiN layers. Geometrical optimization using genetic algorithm coupled with electromagnetic simulations using two-dimensional (2D) finite element method (FEM) results in coupler designs with high peak coupling efficiency of up to 89% for double- mirror and 64% for single-mirror structures at telecom wavelength. Also, 3-dB bandwidths of 40 nm and 50 nm are theoretically predicted for the two designs, respectively. We have fabricated the grating coupler structure with single mirror. Measured values for insertion loss and 3-dB bandwidth in the fabricated single-mirror coupler confirms the theoretical results. This opens up the possibility of low-loss 3D dense integration of optical functionalities in hybrid material platforms.

© 2014 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(130.0130) Integrated optics : Integrated optics

ToC Category:
Integrated Optics

History
Original Manuscript: April 22, 2014
Revised Manuscript: June 16, 2014
Manuscript Accepted: June 19, 2014
Published: July 1, 2014

Citation
Majid Sodagar, Reza Pourabolghasem, Ali A. Eftekhar, and Ali Adibi, "High-efficiency and wideband interlayer grating couplers in multilayer Si/SiO2/SiN platform for 3D integration of optical functionalities," Opt. Express 22, 16767-16777 (2014)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-22-14-16767


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