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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 14 — Jul. 14, 2014
  • pp: 16767–16777

High-efficiency and wideband interlayer grating couplers in multilayer Si/SiO2/SiN platform for 3D integration of optical functionalities

Majid Sodagar, Reza Pourabolghasem, Ali A. Eftekhar, and Ali Adibi  »View Author Affiliations

Optics Express, Vol. 22, Issue 14, pp. 16767-16777 (2014)

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We have designed interlayer grating couplers with single/double metallic reflectors for Si/SiO2/SiN multilayer material platform. Out-of-plane diffractive grating couplers separated by 1.6 μm thick buffer SiO2 layer are vertically stacked against each other in Si and SiN layers. Geometrical optimization using genetic algorithm coupled with electromagnetic simulations using two-dimensional (2D) finite element method (FEM) results in coupler designs with high peak coupling efficiency of up to 89% for double- mirror and 64% for single-mirror structures at telecom wavelength. Also, 3-dB bandwidths of 40 nm and 50 nm are theoretically predicted for the two designs, respectively. We have fabricated the grating coupler structure with single mirror. Measured values for insertion loss and 3-dB bandwidth in the fabricated single-mirror coupler confirms the theoretical results. This opens up the possibility of low-loss 3D dense integration of optical functionalities in hybrid material platforms.

© 2014 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(130.0130) Integrated optics : Integrated optics

ToC Category:
Integrated Optics

Original Manuscript: April 22, 2014
Revised Manuscript: June 16, 2014
Manuscript Accepted: June 19, 2014
Published: July 1, 2014

Majid Sodagar, Reza Pourabolghasem, Ali A. Eftekhar, and Ali Adibi, "High-efficiency and wideband interlayer grating couplers in multilayer Si/SiO2/SiN platform for 3D integration of optical functionalities," Opt. Express 22, 16767-16777 (2014)

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  1. M. C. Tien, J. F. Bauters, M. J. Heck, D. J. Blumenthal, and J. E. Bowers, “Ultra-low loss Si3N4 waveguides with low nonlinearity and high power handling capability,” Opt. Express 18(23), 23562–23568 (2010). [CrossRef] [PubMed]
  2. M. Borselli, T. Johnson, and O. Painter, “Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment,” Opt. Express 13(5), 1515–1530 (2005). [CrossRef] [PubMed]
  3. M. Soltani, S. Yegnanarayanan, and A. Adibi, “Ultra-high Q planar silicon microdisk resonators for chip-scale silicon photonics,” Opt. Express 15(8), 4694–4704 (2007). [CrossRef] [PubMed]
  4. J. F. Bauters, M. J. R. Heck, D. John, D. Dai, M. C. Tien, J. S. Barton, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Ultra-low-loss high-aspect-ratio Si3N4 waveguides,” Opt. Express 19(4), 3163–3174 (2011). [CrossRef] [PubMed]
  5. M. C. Tien, J. F. Bauters, M. J. R. Heck, D. T. Spencer, D. J. Blumenthal, and J. E. Bowers, “Ultra-high quality factor planar Si3N4 ring resonators on Si substrates,” Opt. Express 19(14), 13551–13556 (2011). [CrossRef] [PubMed]
  6. J. F. Bauters, M. L. Davenport, M. J. R. Heck, J. K. Doylend, A. Chen, A. W. Fang, and J. E. Bowers, “Silicon on ultra-low-loss waveguide photonic integration platform,” Opt. Express 21(1), 544–555 (2013). [CrossRef] [PubMed]
  7. Q. Li, A. A. Eftekhar, M. Sodagar, Z. Xia, A. H. Atabaki, and A. Adibi, “Vertical integration of high-Q silicon nitride microresonators into silicon-on-insulator platform,” Opt. Express 21(15), 18236–18248 (2013). [CrossRef] [PubMed]
  8. X. Zheng, J. E. Cunningham, I. Shubin, J. Simons, M. Asghari, D. Feng, H. Lei, D. Zheng, H. Liang, C. C. Kung, J. Luff, T. Sze, D. Cohen, and A. V. Krishnamoorthy, “Optical proximity communication using reflective mirrors,” Opt. Express 16(19), 15052–15058 (2008). [CrossRef] [PubMed]
  9. D. C. Lee, D. Feng, C. C. Kung, J. Fong, W. Qian, X. Zheng, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “Monolithic Chip-to-chip WDM Optical Proximity Coupler Utilizing Echelle Grating Multiplexer/Demultiplexer Integrated with Micro Mirrors Built on SOI Platform,” in Proc. Photon. Soc. Summer Top. Meeting, 215–216 (2010). [CrossRef]
  10. Y. Zhang, D. Kwong, X. Xu, A. Hosseini, S. Y. Yang, J. A. Rogers, and R. T. Chen, “On-chip intra-and inter-layer grating couplers for three-dimensional integration of silicon photonics integration of silicon photonics,” Appl. Phys. Lett. 102, 211109 (2013). [CrossRef]
  11. J. Yao, I. Shubin, X. Zheng, G. Li, Y. Luo, H. Thacker, J. H. Lee, J. Bickford, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “Low Loss optical interlayer coupling using reflector-enhanced grating couplers,” in Proc. 2nd Int. Conf. Opt. Interconnects Conf., 31–32 (2013). [CrossRef]
  12. S. Bernabé, C. Kopp, M. Volpert, J. Harduin, J. M. Fédéli, and H. Ribot, “Chip-to-chip optical interconnections between stacked self-aligned SOI photonic chips,” Opt. Express 20(7), 7886–7894 (2012). [CrossRef] [PubMed]
  13. M. Cabezón, I. Garcés, A. Villafranca, J. Pozo, P. Kumar, and A. Kaźmierczak, “Silicon-on-insulator chip-to-chip coupling via out-of-plane or vertical grating couplers,” Appl. Opt. 51(34), 8090–8094 (2012). [CrossRef] [PubMed]
  14. J. H. Kang, Y. Atsumi, Y. Hayashi, J. Suzuki, Y. Kuno, T. Amemiya, N. Nishiyama, and S. Arai, “Amorphous-silicon inter-layer grating couplers with metal mirrors toward 3-D interconnection,” IEEE J. Sel. Top. Quantum Electron. 20(4), 1–8 (2014). [CrossRef]
  15. F. H. P. M. Habraken, LPCVD Silicon Nitride and Oxynitride Films: Material and Applications in Integrated Circuit Technology (Springer, 1991).
  16. J. M. Cowley, Diffraction physics, Third edition (Elsevier, 1995).
  17. D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett. 29(23), 2749–2751 (2004). [CrossRef] [PubMed]
  18. P. B. Johnson and R. W. Christy, “Optical constants of the noble metals,” Phys. Rev. B 6(12), 4370–4379 (1972). [CrossRef]

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