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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 14 — Jul. 14, 2014
  • pp: 16897–16902

New parallel wavelength-dispersive spectrometer based on scanning electron microscope

Alexei Erko, Alexander Firsov, Renat Gubzhokov, Anjuar Bjeoumikhov, Andreas Günther, Norbert Langhoff, Mario Bretschneider, Yvonne Höhn, and Reiner Wedell  »View Author Affiliations

Optics Express, Vol. 22, Issue 14, pp. 16897-16902 (2014)

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A new wavelength - dispersive X-ray spectrometer for scanning electron microscopy (SEM) has been developed. This spectrometer can cover an energy range from 50 eV to 1120 eV by using an array made of seventeen reflection zone plates. Soft X-ray emission spectra of simple elements of Li, Be, B, C, N, Ti, V, O, Cr, Mn, Fe, Co, Ni, Cu, Zn and Ga were measured. The overall energy resolving power on the order of E/ΔE ~80 to 160 has been demonstrated. Spectrometer with 200 reflection zone plates has been used as a multi-channel analyser in the energy range of 100 – 1000 eV for quasi - continuous spectra measurements. The predicted energy-resolving power on the order of E/ΔE = 50 has been achieved in the entire energy range.

© 2014 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(180.5810) Microscopy : Scanning microscopy
(300.6560) Spectroscopy : Spectroscopy, x-ray
(340.0340) X-ray optics : X-ray optics

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: April 23, 2014
Revised Manuscript: May 23, 2014
Manuscript Accepted: May 26, 2014
Published: July 2, 2014

Alexei Erko, Alexander Firsov, Renat Gubzhokov, Anjuar Bjeoumikhov, Andreas Günther, Norbert Langhoff, Mario Bretschneider, Yvonne Höhn, and Reiner Wedell, "New parallel wavelength-dispersive spectrometer based on scanning electron microscope," Opt. Express 22, 16897-16902 (2014)

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