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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 15 — Jul. 28, 2014
  • pp: 17644–17656

Exploring the depth range for three-dimensional laser machining with aberration correction

P. S. Salter, M. Baum, I. Alexeev, M. Schmidt, and M. J. Booth  »View Author Affiliations

Optics Express, Vol. 22, Issue 15, pp. 17644-17656 (2014)

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The spherical aberration generated when focusing from air into another medium limits the depth at which ultrafast laser machining can be accurately maintained. We investigate how the depth range may be extended using aberration correction via a liquid crystal spatial light modulator (SLM), in both single point and parallel multi-point fabrication in fused silica. At a moderate numerical aperture (NA = 0.5), high fidelity fabrication with a significant level of parallelisation is demonstrated at the working distance of the objective lens, corresponding to a depth in the glass of 2.4 mm. With a higher numerical aperture (NA = 0.75) objective lens, single point fabrication is demonstrated to a depth of 1 mm utilising the full NA, and deeper with reduced NA, while maintaining high repeatability. We present a complementary theoretical model that enables prediction of the effectiveness of SLM based correction for different aberration magnitudes.

© 2014 Optical Society of America

OCIS Codes
(090.1000) Holography : Aberration compensation
(140.3390) Lasers and laser optics : Laser materials processing
(220.4000) Optical design and fabrication : Microstructure fabrication
(250.5300) Optoelectronics : Photonic integrated circuits
(130.2755) Integrated optics : Glass waveguides
(070.6120) Fourier optics and signal processing : Spatial light modulators

ToC Category:
Laser Microfabrication

Original Manuscript: April 10, 2014
Revised Manuscript: June 3, 2014
Manuscript Accepted: June 3, 2014
Published: July 14, 2014

P. S. Salter, M. Baum, I. Alexeev, M. Schmidt, and M. J. Booth, "Exploring the depth range for three-dimensional laser machining with aberration correction," Opt. Express 22, 17644-17656 (2014)

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