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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 15 — Jul. 28, 2014
  • pp: 18440–18453

Multilayer Fresnel zone plates for high energy radiation resolve 21 nm features at 1.2 keV

Kahraman Keskinbora, Anna-Lena Robisch, Marcel Mayer, Umut T. Sanli, Corinne Grévent, Christian Wolter, Markus Weigand, Adriana Szeghalmi, Mato Knez, Tim Salditt, and Gisela Schütz  »View Author Affiliations


Optics Express, Vol. 22, Issue 15, pp. 18440-18453 (2014)
http://dx.doi.org/10.1364/OE.22.018440


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Abstract

X-ray microscopy is a successful technique with applications in several key fields. Fresnel zone plates (FZPs) have been the optical elements driving its success, especially in the soft X-ray range. However, focusing of hard X-rays via FZPs remains a challenge. It is demonstrated here, that two multilayer type FZPs, delivered from the same multilayer deposit, focus both hard and soft X-rays with high fidelity. The results prove that these lenses can achieve at least 21 nm half-pitch resolution at 1.2 keV demonstrated by direct imaging, and sub-30 nm FWHM (full-pitch) resolution at 7.9 keV, deduced from autocorrelation analysis. Reported FZPs had more than 10% diffraction efficiency near 1.5 keV.

© 2014 Optical Society of America

OCIS Codes
(340.0340) X-ray optics : X-ray optics
(340.6720) X-ray optics : Synchrotron radiation
(340.7460) X-ray optics : X-ray microscopy
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
(050.1965) Diffraction and gratings : Diffractive lenses
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
X-ray Optics

History
Original Manuscript: March 17, 2014
Revised Manuscript: June 18, 2014
Manuscript Accepted: June 19, 2014
Published: July 23, 2014

Virtual Issues
Vol. 9, Iss. 9 Virtual Journal for Biomedical Optics

Citation
Kahraman Keskinbora, Anna-Lena Robisch, Marcel Mayer, Umut T. Sanli, Corinne Grévent, Christian Wolter, Markus Weigand, Adriana Szeghalmi, Mato Knez, Tim Salditt, and Gisela Schütz, "Multilayer Fresnel zone plates for high energy radiation resolve 21 nm features at 1.2 keV," Opt. Express 22, 18440-18453 (2014)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-22-15-18440


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