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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 15 — Jul. 28, 2014
  • pp: 18519–18526

Tunable distributed Bragg reflectors with wide-angle and broadband high-reflectivity using nanoporous/dense titanium dioxide film stacks for visible wavelength applications

Jung Woo Leem, Xiang-Yu Guan, and Jae Su Yu  »View Author Affiliations

Optics Express, Vol. 22, Issue 15, pp. 18519-18526 (2014)

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Highly-tolerant distributed Bragg reflectors (DBRs) based on the same materials consisting of nanoporous/dense titanium dioxide (TiO2) film pair structures with wide-angle and broadband highly-reflective properties at visible wavelengths are reported. For a high refractive index contrast, the two dense and nanoporous TiO2 film stacks are alternatingly deposited on silicon (Si) substrates by a oblique angle deposition (OAD) method at two vapor flux angles (θα) of 0 and 80° for high and low refractive indices, respectively. For the TiO2 DBRs at a center wavelength (λc) of 540 nm, the maximum level in reflectance (R) band is increased with increasing the number of pairs, exhibiting high R values of > 90% for 5 pairs, and the normalized stop bandwidth (∆λ/λc) of ~17.8% is obtained. At λc = 540 nm, the patterned TiO2 DBR with 5 pairs shows an uniform relative reflectivity over a whole surface of 3 inch-sized Si wafer and a large-scalable fabrication capability with any features. The angle-dependent reflectance characteristics of TiO2 DBR at λc = 540 nm are also studied at incident angles (θinc) of 20-70° for p-, s-, and non-polarized lights in the wavelength region of 350-750 nm, yielding high R values of > 70.4% at θinc values of 20-70° for non-polarized light. By adjusting the λc/4 thicknesses of nanoporous and dense films, for λc = 450, 540, and 680 nm, tunable broadband TiO2 DBRs with high R values of > 90% at wavelengths of 400-800 nm are realized.

© 2014 Optical Society of America

OCIS Codes
(230.1480) Optical devices : Bragg reflectors
(310.1860) Thin films : Deposition and fabrication
(310.4165) Thin films : Multilayer design

ToC Category:
Optical Devices

Original Manuscript: May 28, 2014
Revised Manuscript: July 7, 2014
Manuscript Accepted: July 11, 2014
Published: July 23, 2014

Jung Woo Leem, Xiang-Yu Guan, and Jae Su Yu, "Tunable distributed Bragg reflectors with wide-angle and broadband high-reflectivity using nanoporous/dense titanium dioxide film stacks for visible wavelength applications," Opt. Express 22, 18519-18526 (2014)

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