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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 16 — Aug. 11, 2014
  • pp: 19029–19039

A 32 × 32 optical phased array using polysilicon sub-wavelength high-contrast-grating mirrors

Byung-Wook Yoo, Mischa Megens, Tianbo Sun, Weijian Yang, Connie J. Chang-Hasnain, David A. Horsley, and Ming C. Wu  »View Author Affiliations

Optics Express, Vol. 22, Issue 16, pp. 19029-19039 (2014)

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We report on microelectromechanical systems (MEMS)-actuated 32 × 32 optical phased arrays (OPAs) with high fill-factors and microsecond response time. To reduce the mirror weight and temperature-dependent curvature, we use high-contrast-grating (HCG) mirrors comprising a single layer of sub-wavelength polysilicon gratings with 400 nm thickness, 1250 nm pitch, and 570 nm grating bar width. The mirror has a broad reflection band and a peak reflectivity of 99.9% at 1550 nm wavelength. With 20 × 20 μm2 pixels and 2 μm, the OPA has a total aperture of 702 × 702 μm2 and a fill factor of 85%. The OPA is electrostatically controlled by voltage and has a total field of view of ± 2°, an instantaneous field of view (beam width) of 0.14°, and a response time of 3.8 μs. The latter agrees well with the mechanical resonance frequency of the HCG mirror (0.42 MHz).

© 2014 Optical Society of America

OCIS Codes
(110.5100) Imaging systems : Phased-array imaging systems
(230.1950) Optical devices : Diffraction gratings
(220.4241) Optical design and fabrication : Nanostructure fabrication
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:
Optical Devices

Original Manuscript: June 10, 2014
Revised Manuscript: July 18, 2014
Manuscript Accepted: July 19, 2014
Published: July 29, 2014

Byung-Wook Yoo, Mischa Megens, Tianbo Sun, Weijian Yang, Connie J. Chang-Hasnain, David A. Horsley, and Ming C. Wu, "A 32 × 32 optical phased array using polysilicon sub-wavelength high-contrast-grating mirrors," Opt. Express 22, 19029-19039 (2014)

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