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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 16 — Aug. 11, 2014
  • pp: 19546–19554

Three-dimensional (3D) monolithically integrated photodetector and WDM receiver based on bulk silicon wafer

Junfeng Song, Xianshu Luo, Xiaoguang Tu, Lianxi Jia, Qing Fang, Tsung-Yang Liow, Mingbin Yu, and Guo-Qiang Lo  »View Author Affiliations


Optics Express, Vol. 22, Issue 16, pp. 19546-19554 (2014)
http://dx.doi.org/10.1364/OE.22.019546


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Abstract

We propose a novel three-dimensional (3D) monolithic optoelectronic integration platform. Such platform integrates both electrical and photonic devices in a bulk silicon wafer, which eliminates the high-cost silicon-on-insulator (SOI) wafer and is more suitable for process requirements of electronic and photonic integrated circuits (ICs). For proof-of-concept, we demonstrate a three-dimensional photodetector and WDM receiver system. The Ge is grown on a 8-inch bulk silicon wafer while the optical waveguide is defined in a SiN layer which is deposited on top of it, with ~4 µm oxide sandwiched in between. The light is directed to the Ge photodetector from the SiN waveguide vertically by using grating coupler with a Aluminum mirror on top of it. The measured photodetector responsivity is ~0.2 A/W and the 3-dB bandwidth is ~2 GHz. Using such vertical-coupled photodetector, we demonstrated an 8-channel receiver by integrating a 1 × 8 arrayed waveguide grating (AWG). High-quality optical signal detection with up to 10 Gbit/s data rate is demonstrated, suggesting a 80 Gbit/s throughput. Such receiver can be applied to on-chip optical interconnect, DRAM interface, and telecommunication systems.

© 2014 Optical Society of America

OCIS Codes
(040.5160) Detectors : Photodetectors
(050.2770) Diffraction and gratings : Gratings
(130.0250) Integrated optics : Optoelectronics
(130.3120) Integrated optics : Integrated optics devices

ToC Category:
Detectors

History
Original Manuscript: April 28, 2014
Revised Manuscript: June 27, 2014
Manuscript Accepted: June 29, 2014
Published: August 5, 2014

Citation
Junfeng Song, Xianshu Luo, Xiaoguang Tu, Lianxi Jia, Qing Fang, Tsung-Yang Liow, Mingbin Yu, and Guo-Qiang Lo, "Three-dimensional (3D) monolithically integrated photodetector and WDM receiver based on bulk silicon wafer," Opt. Express 22, 19546-19554 (2014)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-22-16-19546


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