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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 3 — Feb. 10, 2014
  • pp: 2247–2258

Guided mode resonance enabled ultra-compact Germanium photodetector for 1.55 μm detection

Alexander Yutong Zhu, Shiyang Zhu, and Guo-Qiang Lo  »View Author Affiliations

Optics Express, Vol. 22, Issue 3, pp. 2247-2258 (2014)

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We propose a novel technique of enhancing the photodetection capabilities of ultrathin Ge films for normally incident light at 1.55 μm through the guided mode resonance (GMR) phenomenon. Specifically, by suitably patterning the surface of a Ge thin film, it is possible to excite guided modes which are subsequently coupled to free space radiative modes, resulting in spectral resonances that possess locally enhanced near fields with a large spatial extent. Absorption is found to be enhanced by over an order of magnitude over a pristine Ge film of equal thickness. Furthermore, attenuation of incident light for such a structure occurs over very few grating periods, resulting in significantly enhanced theoretical 3 dB bandwidth-efficiency products of ~58 GHz. The nature of the enhancement mechanism also produces spectrally narrow resonances (FWHM ~30 nm) that are polarization sensitive and exhibit excellent angular tolerance. Finally, the proposed device architecture is fully compatible with existing Si infrastructure and current CMOS fabrication processes.

© 2014 Optical Society of America

OCIS Codes
(040.5160) Detectors : Photodetectors
(230.1950) Optical devices : Diffraction gratings
(240.0310) Optics at surfaces : Thin films

ToC Category:

Original Manuscript: August 13, 2013
Manuscript Accepted: October 14, 2013
Published: January 28, 2014

Alexander Yutong Zhu, Shiyang Zhu, and Guo-Qiang Lo, "Guided mode resonance enabled ultra-compact Germanium photodetector for 1.55 μm detection," Opt. Express 22, 2247-2258 (2014)

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  1. D. J. Lockwood and L. Pavesi, Silicon Photonics II: Components and Integration (Springer, 2011).
  2. L. C. Kimerling, “Silicon microphotonics,” Appl. Surf. Sci.159, 8–13 (2000). [CrossRef]
  3. J. Michel, J. F. Liu, and L. C. Kimerling, “High-performance Ge-on-Si photodetectors,” Nat. Photonics4(8), 527–534 (2010). [CrossRef]
  4. L. Vivien, M. Rouvière, J. M. Fédéli, D. Marris-Morini, J. F. Damlencourt, J. Mangeney, P. Crozat, L. El Melhaoui, E. Cassan, X. Le Roux, D. Pascal, and S. Laval, “High speed and high responsivity germanium photodetector integrated in a Silicon-On-Insulator microwaveguide,” Opt. Express15(15), 9843–9848 (2007). [CrossRef] [PubMed]
  5. K. W. Ang, T. Y. Liow, M. B. Yu, Q. Fang, J. F. Song, G. Q. Lo, and D. L. Kwong, “Low thermal budget monolithic integration of evanescent-coupled Ge-on-SOI photodetector on Si CMOS platform,” IEEE J. Sel. Top. In Quan. Electron. 16, 106–113 (2010).
  6. S. Zhu, H. S. Chu, G. Q. Lo, P. Bai, and D. L. Kwong, “Waveguide-integrated near-infrared detector with self-assembled metal sillicide nanoparticles embedded in a silicon p-n junction,” Appl. Phys. Lett.100(6), 061109 (2012). [CrossRef]
  7. M. S. Unlu and S. Strite, “Resonant-cavity enhanced photonic devices,” J. Appl. Phys.78(2), 607–639 (1995). [CrossRef]
  8. Y. A. Akimov, W. S. Koh, and K. Ostrikov, “Enhancement of optical absorption in thin-film solar cells through the excitation of higher-order nanoparticle plasmon modes,” Opt. Express17(12), 10195–10205 (2009). [CrossRef] [PubMed]
  9. J. N. Munday and H. A. Atwater, “Large integrated absorption enhancement in plasmonic solar cells by combining metallic gratings and antireflection coatings,” Nano Lett.11(6), 2195–2201 (2011). [CrossRef] [PubMed]
  10. R. A. Pala, J. White, E. Barnard, J. Liu, and M. L. Brongersma, “Design of plasmonic thin-film solar cells with broadband absorption enhancements,” Adv. Mater.21(34), 3504–3509 (2009). [CrossRef]
  11. C. L. Tan, A. Karar, K. Alameh, and Y. T. Lee, “Optical absorption enhancement of hybrid-plasmonic-based metal-semiconductor-metal photodetector incorporating metal nanogratings and embedded metal nanoparticles,” Opt. Express21(2), 1713–1725 (2013). [CrossRef] [PubMed]
  12. L. Tang, S. E. Kocabas, S. Latif, A. K. Okyay, D. S. Ly-Gagnon, K. C. Saraswat, and D. A. B. Miller, “Nanometre-scale germanium photodetector enhanced by a near-infrared dipole antenna,” Nat. Photonics2(4), 226–229 (2008). [CrossRef]
  13. L. Tang, D. A. B. Miller, A. K. Okyay, J. A. Matteo, Y. Yuen, K. C. Saraswat, and L. Hesselink, “C-shaped nanoaperture-enhanced germanium photodetector,” Opt. Lett.31(10), 1519–1521 (2006). [CrossRef] [PubMed]
  14. K. R. Catchpole and A. Polman, “Plasmonic solar cells,” Opt. Express16(26), 21793–21800 (2008). [CrossRef] [PubMed]
  15. K. R. Catchpole and A. Polman, “Design principles for particle plasmon enhanced solar cells,” Appl. Phys. Lett.93(19), 191113 (2008). [CrossRef]
  16. M. K. Emsley, O. Dosunmu, and M. S. Unlu, “High-speed resonant-cavity-enhanced silicon photodetectors on reflecting silicon-on-insulator substrates,” IEEE Photon. Technol. Lett.14(4), 519–521 (2002). [CrossRef]
  17. J. D. Schaub, R. Li, C. L. Schow, J. C. Campbell, G. W. Neudeck, and J. Denton, “Resonant-cavity-enhanced high-speed Si photodiode grown by epitaxial lateral overgrowth,” IEEE Photon. Technol. Lett.11(12), 1647–1649 (1999). [CrossRef]
  18. O. I. Dosunmu, D. D. Cannon, M. K. Emsley, L. C. Kimerling, and M. S. Unlu, “High-speed resonant cavity enhanced Ge photodetectors on reflecting Si substrates for 1550-nm operation,” IEEE Photon. Technol. Lett.17(1), 175–177 (2005). [CrossRef]
  19. X. Sheng, S. G. Johnson, L. Z. Broderick, J. Michel, and L. C. Kimerling, “Integrated photonic structures for light trapping in thin-film Si solar cells,” Appl. Phys. Lett.100(11), 111110 (2012). [CrossRef]
  20. L. Zeng, Y. Yi, C. Hong, J. Liu, N. Feng, X. Duan, L. C. Kimerling, and B. A. Alamariu, “Efficiency enhancement in Si solar cells by textured photonic crystal back reflector,” Appl. Phys. Lett.89(11), 111111 (2006). [CrossRef]
  21. L. Y. Cao, J. S. Park, P. Y. Fan, B. Clemens, and M. L. Brongersma, “Resonant germanium nanoantenna photodetectors,” Nano Lett.10(4), 1229–1233 (2010). [CrossRef] [PubMed]
  22. T. Akatsu, C. Deguet, L. Sanchez, F. Allibert, D. Rouchon, T. Signamarcheix, C. Richtarch, A. Boussagol, V. Loup, F. Mazen, J.-M. Hartmann, Y. Campidelli, L. Clavelier, F. Letertre, N. Kernevez, and C. Mazure, “Germanium-on-insulator (GeOI) substrates – a novel engineered substrate for future high performance devices,” Mater. Sci. Semicond. Process.9(4-5), 444–448 (2006). [CrossRef]
  23. J. M. Baribeau, T. E. Jackman, D. C. Houghton, P. Maigne, and M. W. Denhoff, “Growth and characterization of Si1-xGex and Ge epilayers on (100) Si,” J. Appl. Phys.63(12), 5738–5746 (1988). [CrossRef]
  24. L. Colace, G. Masini, F. Galluzzi, G. Assanto, G. Capellini, L. Di Gaspare, and F. Evangelisti, “Ge/Si (001) photodetector for near infrared light,” Solid State Phenom.54, 55–58 (1997). [CrossRef]
  25. H. C. Luan, D. R. Lim, K. K. Lee, K. M. Chen, J. G. Sandland, K. Wada, and L. C. Kimerling, “High-quality Ge epilayers on Si with low threading-dislocation densities,” Appl. Phys. Lett.75(19), 2909–2911 (1999). [CrossRef]
  26. G. S. Oehrlein, G. M. W. Kroesen, E. Defresart, Y. Zhang, and T. D. Bestwick, “Studies of the reactive ion etching of SiGe alloys,” J. Vac. Sci. Technol. A9(3), 768–774 (1991). [CrossRef]
  27. N.-N. Feng, P. Dong, D. Zheng, S. Liao, H. Liang, R. Shafiiha, D. Feng, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “Vertical p-i-n germanium photodetector with high external responsivity integrated with large core Si waveguides,” Opt. Express18(1), 96–101 (2010). [CrossRef] [PubMed]
  28. L. Vivien, J. Osmond, J.-M. Fédéli, D. Marris-Morini, P. Crozat, J. F. Damlencourt, E. Cassan, Y. Lecunff, and S. Laval, “42 GHz p.i.n germanium photodetector integrated in a silicon-on-insulator waveguide,” Opt. Express17(8), 6252–6257 (2009). [CrossRef] [PubMed]
  29. J. Werner, M. Oehme, M. Schmid, M. Kaschel, A. Schirmer, E. Kasper, and J. Schulze, “Germanium-Tin p-i-n photodetectors integrated on silicon grown by molecular beam epitaxy,” Appl. Phys. Lett.98(6), 061108 (2011). [CrossRef]
  30. R. Magnusson and S. S. Wang, “New principle for optical filters,” Appl. Phys. Lett.61(9), 1022–1024 (1992). [CrossRef]
  31. S. S. Wang and R. Magnusson, “Theory and applications of guided-mode resonance filters,” Appl. Opt.32(14), 2606–2613 (1993). [CrossRef] [PubMed]
  32. Z. S. Liu, S. Tibuleac, D. Shin, P. P. Young, and R. Magnusson, “High-efficiency guided-mode resonance filter,” Opt. Lett.23(19), 1556–1558 (1998). [CrossRef] [PubMed]
  33. J. H. Schmid, W. Sinclair, J. García, S. Janz, J. Lapointe, D. Poitras, Y. Li, T. Mischki, G. Lopinski, P. Cheben, A. Delâge, A. Densmore, P. Waldron, and D. X. Xu, “Silicon-on-insulator guided mode resonant grating for evanescent field molecular sensing,” Opt. Express17(20), 18371–18380 (2009). [CrossRef] [PubMed]
  34. A. Szeghalmi, E. B. Kley, and M. Knez, “Theoretical and experimental analysis of the sensitivity of guided mode resonance sensors,” J. Phys. Chem. C114(49), 21150–21157 (2010). [CrossRef]
  35. C. Y. Wei, S. J. Liu, D. G. Deng, J. Shen, J. D. Shao, and Z. X. Fan, “Electric field enhancement in guided-mode resonance filters,” Opt. Lett.31(9), 1223–1225 (2006). [CrossRef] [PubMed]
  36. P. R. Villeneuve and M. Piché, “Photonic band gaps in two-dimensional square and hexagonal lattices,” Phys. Rev. B Condens. Matter46(8), 4969–4972 (1992). [CrossRef] [PubMed]
  37. Y. Kokubun, Lightwave Engineering (CRC Press, 2013).
  38. D. M. Whittaker and I. S. Culshaw, “Scattering-matrix treatment of patterned multilayer photonic structures,” Phys. Rev. B60(4), 2610–2618 (1999). [CrossRef]

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