OSA's Digital Library

Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 3 — Feb. 10, 2014
  • pp: 2845–2852

Heterodyne moiré surface profilometry

Wei-Yao Chang, Fan-Hsi Hsu, Kun-Huang Chen, Jing-Heng Chen, and Ken Y. Hsu  »View Author Affiliations


Optics Express, Vol. 22, Issue 3, pp. 2845-2852 (2014)
http://dx.doi.org/10.1364/OE.22.002845


View Full Text Article

Enhanced HTML    Acrobat PDF (1448 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

In this study, a novel moiré fringe analysis technique is proposed for measuring the surface profile of an object. After applying a relative displacement between two gratings at a constant velocity, every pixel of CMOS camera can capture a heterodyne moiré signal. The precise phase distribution of the moiré fringes can be extracted using a one-dimensional fast Fourier transform (FFT) analysis on every pixel, simultaneously filtering the harmonic noise of the moiré fringes. Finally, the surface profile of the tested objected can be generated by substituting the phase distribution into the relevant equation. The findings demonstrate the feasibility of this measuring method, and the measurement error was approximately 4.3 μm. The proposed method exhibits the merits of the Talbot effect, projection moiré method, FFT analysis, and heterodyne interferometry.

© 2014 Optical Society of America

OCIS Codes
(040.2840) Detectors : Heterodyne
(070.6760) Fourier optics and signal processing : Talbot and self-imaging effects
(120.4120) Instrumentation, measurement, and metrology : Moire' techniques
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: October 24, 2013
Revised Manuscript: January 20, 2014
Manuscript Accepted: January 29, 2014
Published: January 31, 2014

Citation
Wei-Yao Chang, Fan-Hsi Hsu, Kun-Huang Chen, Jing-Heng Chen, and Ken Y. Hsu, "Heterodyne moiré surface profilometry," Opt. Express 22, 2845-2852 (2014)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-22-3-2845


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. H. Takasaki, “Moiré topography from its birth to practical application,” Opt. Lasers Eng. 3(1), 3–14 (1982). [CrossRef]
  2. J. J. J. Dirckx, W. F. Decraemer, G. Dielis, “Phase shift method based on object translation for full field automatic 3-D surface reconstruction from moire topograms,” Appl. Opt. 27(6), 1164–1169 (1988). [CrossRef] [PubMed]
  3. A. A. Mudassar, S. Butt, “Self-imaging-based laser collimation testing technique,” Appl. Opt. 49(31), 6057–6062 (2010). [CrossRef]
  4. J. Dhanotia, S. Prakash, “Automated collimation testing by incorporating the Fourier transform method in Talbot interferometry,” Appl. Opt. 50(10), 1446–1452 (2011). [CrossRef] [PubMed]
  5. J. Y. Lee, Y. H. Wang, L. J. Lai, Y. J. Lin, Y. H. Chang, “Development of an auto-focus system based on the moiré method,” Measurement 44(10), 1793–1800 (2011). [CrossRef]
  6. Y. Nakano, K. Murata, “Talbot interferometry for measuring the focal length of a lens,” Appl. Opt. 24(19), 3162–3166 (1985). [CrossRef] [PubMed]
  7. M. de Angelis, S. De Nicola, P. Ferraro, A. Finizio, G. Pierattini, “A new approach to high accuracy measurement of the focal lengths of lenses using a digital Fourier transform,” Opt. Commun. 136(5-6), 370–374 (1997). [CrossRef]
  8. M. Ramulu, P. Labossiere, T. Greenwell, “Elastic–plastic stress/strain response of friction stir-welded titanium butt joints using moiré interferometry,” Opt. Lasers Eng. 48(3), 385–392 (2010). [CrossRef]
  9. K. S. Lee, C. J. Tang, H. C. Chen, C. C. Lee, “Measurement of stress in aluminum film coated on a flexible substrate by the shadow moiré method,” Appl. Opt. 47(13), C315–C318 (2008). [CrossRef] [PubMed]
  10. M. Takeda, H. Ina, S. Kobayashi, “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. Am. 72(1), 156–160 (1982). [CrossRef]
  11. Y. M. He, C. J. Tay, H. M. Shang, “Deformation and profile measurement using the digital projection grating method,” Opt. Lasers Eng. 30(5), 367–377 (1998). [CrossRef]
  12. S. Mirza, C. Shakher, “Surface profiling using phase shifting Talbot interferometric technique,” Opt. Eng. 44(1), 013601 (2005). [CrossRef]
  13. C. Quan, Y. Fu, C. J. Tay, “Determination of surface contour by temporal analysis of shadow moiré fringes,” Opt. Commun. 230(1-3), 23–33 (2004). [CrossRef]
  14. Y. B. Choi, S. W. Kim, “Phase-shifting grating projection moiré topography,” Opt. Eng. 37(3), 1005–1010 (1998). [CrossRef]
  15. J. A. N. Buytaert, J. J. J. Dirckx, “Design considerations in projection phase-shift moiré topography based on theoretical analysis of fringe formation,” J. Opt. Soc. Am. A 24(7), 2003–2013 (2007). [CrossRef] [PubMed]
  16. J. A. N. Buytaert, J. J. J. Dirckx, “Moiré profilometry using liquid crystals for projection and demodulation,” Opt. Express 16(1), 179–193 (2008). [CrossRef] [PubMed]
  17. J. J. J. Dirckx, J. A. N. Buytaert, S. A. M. Van Der Jeught, “Implementation of phase-shifting moire profilometry on a low-cost commercial data projector,” Opt. Lasers Eng. 48(2), 244–250 (2010). [CrossRef]
  18. J. A. N. Buytaert, J. J. J. Dirckx, “Study of the performance of 84 phase-shifting algorithms for interferometry,” J. Opt. 40(3), 114–131 (2011). [CrossRef]
  19. M. Testorf, J. Jahns, N. A. Khilo, A. M. Goncharenko, “Talbot effect for oblique angle of light propagation,” Opt. Commun. 129(3-4), 167–172 (1996). [CrossRef]
  20. D. C. Su, M. H. Chiu, C. D. Chen, “A heterodyne interferometer using an electro-optic modulator for measuring small displacement,” J. Opt. 27(1), 19–23 (1996). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited