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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 3 — Feb. 10, 2014
  • pp: 2845–2852

Heterodyne moiré surface profilometry

Wei-Yao Chang, Fan-Hsi Hsu, Kun-Huang Chen, Jing-Heng Chen, and Ken Y. Hsu  »View Author Affiliations

Optics Express, Vol. 22, Issue 3, pp. 2845-2852 (2014)

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In this study, a novel moiré fringe analysis technique is proposed for measuring the surface profile of an object. After applying a relative displacement between two gratings at a constant velocity, every pixel of CMOS camera can capture a heterodyne moiré signal. The precise phase distribution of the moiré fringes can be extracted using a one-dimensional fast Fourier transform (FFT) analysis on every pixel, simultaneously filtering the harmonic noise of the moiré fringes. Finally, the surface profile of the tested objected can be generated by substituting the phase distribution into the relevant equation. The findings demonstrate the feasibility of this measuring method, and the measurement error was approximately 4.3 μm. The proposed method exhibits the merits of the Talbot effect, projection moiré method, FFT analysis, and heterodyne interferometry.

© 2014 Optical Society of America

OCIS Codes
(040.2840) Detectors : Heterodyne
(070.6760) Fourier optics and signal processing : Talbot and self-imaging effects
(120.4120) Instrumentation, measurement, and metrology : Moire' techniques
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: October 24, 2013
Revised Manuscript: January 20, 2014
Manuscript Accepted: January 29, 2014
Published: January 31, 2014

Wei-Yao Chang, Fan-Hsi Hsu, Kun-Huang Chen, Jing-Heng Chen, and Ken Y. Hsu, "Heterodyne moiré surface profilometry," Opt. Express 22, 2845-2852 (2014)

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