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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 3 — Feb. 10, 2014
  • pp: 3145–3150

Dimensional variation tolerant silicon-on-insulator directional couplers

Jared C. Mikkelsen, Wesley D. Sacher, and Joyce K. S. Poon  »View Author Affiliations


Optics Express, Vol. 22, Issue 3, pp. 3145-3150 (2014)
http://dx.doi.org/10.1364/OE.22.003145


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Abstract

We design silicon ridge/rib waveguide directional couplers which are simultaneously tolerant to width, height, coupling gap, and etch depth variations. Using wafer-scale measurements of structures fabricated in the IMEC Standard Passives process, we demonstrate the normalized standard deviation in the per-length coupling coefficient (a metric for the splitting ratio variation) of the variation-tolerant directional couplers is up to 4 times smaller than that of strip waveguide designs. The variation-tolerant couplers are also the most broadband and the deviation in the coupling coefficient shows the lowest spectral dependence.

© 2014 Optical Society of America

OCIS Codes
(230.3120) Optical devices : Integrated optics devices
(230.7370) Optical devices : Waveguides

ToC Category:
Integrated Optics

History
Original Manuscript: December 17, 2013
Revised Manuscript: January 19, 2014
Manuscript Accepted: January 21, 2014
Published: February 3, 2014

Citation
Jared C. Mikkelsen, Wesley D. Sacher, and Joyce K. S. Poon, "Dimensional variation tolerant silicon-on-insulator directional couplers," Opt. Express 22, 3145-3150 (2014)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-22-3-3145


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