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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 3 — Feb. 10, 2014
  • pp: 3432–3438

Nanoscale topography and spatial light modulator characterization using wide-field quantitative phase imaging

Gannavarpu Rajshekhar, Basanta Bhaduri, Chris Edwards, Renjie Zhou, Lynford L. Goddard, and Gabriel Popescu  »View Author Affiliations


Optics Express, Vol. 22, Issue 3, pp. 3432-3438 (2014)
http://dx.doi.org/10.1364/OE.22.003432


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Abstract

We demonstrate an optical technique for large field of view quantitative phase imaging of reflective samples. It relies on a common-path interferometric design, which ensures high stability without the need for active stabilization. The technique provides single-shot, full-field and robust measurement of nanoscale topography of large samples. Further, the inherent stability allows reliable measurement of the temporally varying phase retardation of the liquid crystal cells, and thus enables real-time characterization of spatial light modulators. The technique’s application potential is validated through experimental results.

© 2014 Optical Society of America

OCIS Codes
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(110.3175) Imaging systems : Interferometric imaging
(070.6120) Fourier optics and signal processing : Spatial light modulators

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: November 15, 2013
Revised Manuscript: December 20, 2013
Manuscript Accepted: January 14, 2014
Published: February 5, 2014

Citation
Gannavarpu Rajshekhar, Basanta Bhaduri, Chris Edwards, Renjie Zhou, Lynford L. Goddard, and Gabriel Popescu, "Nanoscale topography and spatial light modulator characterization using wide-field quantitative phase imaging," Opt. Express 22, 3432-3438 (2014)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-22-3-3432


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