OSA's Digital Library

Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 5 — Mar. 10, 2014
  • pp: 5098–5105

3D surface mapping of freeform optics using wavelength scanning lateral shearing interferometry

Young-Sik Ghim, Hyug-Gyo Rhee, Angela Davies, Ho-Soon Yang, and Yun-Woo Lee  »View Author Affiliations


Optics Express, Vol. 22, Issue 5, pp. 5098-5105 (2014)
http://dx.doi.org/10.1364/OE.22.005098


View Full Text Article

Enhanced HTML    Acrobat PDF (1866 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Freeform optics have emerged as promising components in diverse applications due to the potential for superior optical performance. There are many research fields in the area ranging from fabrication to measurement, with metrology being one of the most challenging tasks. In this paper, we describe a new variant of lateral shearing interferometer with a tunable laser source that enables 3D surface profile measurements of freeform optics with high speed, high vertical resolution, large departure, and large field-of-view. We have verified the proposed technique by comparing our measurement result with that of an existing technique and measuring a representative freeform optic.

© 2014 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.4640) Instrumentation, measurement, and metrology : Optical instruments

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: January 20, 2014
Revised Manuscript: February 9, 2014
Manuscript Accepted: February 11, 2014
Published: February 25, 2014

Citation
Young-Sik Ghim, Hyug-Gyo Rhee, Angela Davies, Ho-Soon Yang, and Yun-Woo Lee, "3D surface mapping of freeform optics using wavelength scanning lateral shearing interferometry," Opt. Express 22, 5098-5105 (2014)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-22-5-5098


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. E. Savio, L. D. Chiffre, R. Schmitt, “Metrology of freeform shaped parts,” Annals of the CIRP 56(2), 810–835 (2007). [CrossRef]
  2. R. Henselmans, L. A. Cacace, G. F. Y. Kramer, P. C. J. N. Rosielle, M. Steinbuch, “The NANOMEFOS non-contact measurement machine for freeform optics,” Precis. Eng. 35(4), 607–624 (2011). [CrossRef]
  3. C. Faber, E. Olesch, R. Krobot, and G. Häusler, “Deflectometry challenges interferometry – the competition gets tougher!,” Proc. SPIE 8493, 0R-1-0R-15(2013).
  4. G. Häusler, C. Faber, E. Olesch, and S. Ettl, “Deflectometry vs. Interferometry,” Proc. SPIE 8788, 1C–1-1C–11(2013).
  5. M. V. R. K. Murty, “The use of a single plane parallel plate as a lateral shearing interferometer with a visible gas laser source,” Appl. Opt. 3(4), 531–534 (1964). [CrossRef]
  6. J. C. Wyant, “Double frequency grating lateral shear interferometer,” Appl. Opt. 12(9), 2057–2060 (1973). [CrossRef] [PubMed]
  7. M. P. Rimmer, “Method for evaluating lateral shearing interferograms,” Appl. Opt. 13(3), 623–629 (1974). [CrossRef] [PubMed]
  8. M. P. Rimmer, J. C. Wyant, “Evaluation of large aberrations using a lateral-shear interferometer having variable shear,” Appl. Opt. 14(1), 142–150 (1975). [CrossRef] [PubMed]
  9. S. Okuda, T. Nomura, K. Kamiya, H. Miyashiro, K. Yoshikawa, H. Tashiro, “High-precision analysis of a lateral shearing interferogram by use of the integration method and polynomials,” Appl. Opt. 39(28), 5179–5186 (2000). [CrossRef] [PubMed]
  10. H.-H. Lee, J.-H. You, S.-H. Park, “Phase-shifting lateral shearing interferometer with two pairs of wedge plates,” Opt. Lett. 28(22), 2243–2245 (2003). [CrossRef] [PubMed]
  11. P. Liang, J. Ding, Z. Jin, C.-S. Guo, H.-T. Wang, “Two-dimensional wave-front reconstruction from lateral shearing interferograms,” Opt. Express 14(2), 625–634 (2006). [CrossRef] [PubMed]
  12. S. Ettl, J. Kaminski, M. C. Knauer, G. Häusler, “Shape reconstruction from gradient data,” Appl. Opt. 47(12), 2091–2097 (2008). [CrossRef] [PubMed]
  13. F. Dai, F. Tang, X. Wang, O. Sasaki, “Generalized zonal wavefront reconstruction for high spatial resolution in lateral shearing interferometry,” J. Opt. Soc. Am. A 29(9), 2038–2047 (2012). [CrossRef] [PubMed]
  14. H.-G. Rhee, Y.-S. Ghim, J. Lee, H.-S. Yang, Y.-W. Lee, “Correction of rotational inaccuracy in lateral shearing interferometry for freeform measurement,” Opt. Express 21(21), 24799–24808 (2013). [CrossRef] [PubMed]
  15. M. Takeda, H. Yamamoto, “Fourier-transform speckle profilometry: three-dimensional shape measurements of diffuse objects with large height steps and/or spatially isolated surfaces,” Appl. Opt. 33(34), 7829–7837 (1994). [CrossRef] [PubMed]
  16. M. Takeda, H. Ina, S. Kobayashi, “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. Am. 72(1), 156–160 (1982). [CrossRef]
  17. Y.-S. Ghim, S.-W. Kim, “Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry,” Opt. Express 14(24), 11885–11891 (2006). [CrossRef] [PubMed]
  18. L. L. Deck, “Fourier-transform phase-shifting interferometry,” Appl. Opt. 42(13), 2354–2365 (2003). [CrossRef] [PubMed]
  19. W. H. Southwell, “Wave-front estimation from wave-front slope measurements,” J. Opt. Soc. Am. 70(8), 998–1006 (1980). [CrossRef]
  20. D. Malacara-Doblado, I. Ghozeil, “Hartmann, Hartmann-Shack, and Other Screen Tests,” in optical shop testing 3rd ed., Wiley Series in Pure and Applied Optics (Wiley, 2007), 361–397.
  21. ASME B46.1–2002, “Terminology and measurement procedures for profiling, contact, skidless instruments,”in Surface texture (Surface roughness, waviness, and lay). (Amer. Soc. of Mech. Engrs., 2003), Section 3.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 
Fig. 4
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited