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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 5 — Mar. 10, 2014
  • pp: 5098–5105

3D surface mapping of freeform optics using wavelength scanning lateral shearing interferometry

Young-Sik Ghim, Hyug-Gyo Rhee, Angela Davies, Ho-Soon Yang, and Yun-Woo Lee  »View Author Affiliations

Optics Express, Vol. 22, Issue 5, pp. 5098-5105 (2014)

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Freeform optics have emerged as promising components in diverse applications due to the potential for superior optical performance. There are many research fields in the area ranging from fabrication to measurement, with metrology being one of the most challenging tasks. In this paper, we describe a new variant of lateral shearing interferometer with a tunable laser source that enables 3D surface profile measurements of freeform optics with high speed, high vertical resolution, large departure, and large field-of-view. We have verified the proposed technique by comparing our measurement result with that of an existing technique and measuring a representative freeform optic.

© 2014 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.4640) Instrumentation, measurement, and metrology : Optical instruments

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: January 20, 2014
Revised Manuscript: February 9, 2014
Manuscript Accepted: February 11, 2014
Published: February 25, 2014

Young-Sik Ghim, Hyug-Gyo Rhee, Angela Davies, Ho-Soon Yang, and Yun-Woo Lee, "3D surface mapping of freeform optics using wavelength scanning lateral shearing interferometry," Opt. Express 22, 5098-5105 (2014)

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